초록 ▼

An apparatus for preparing high-purity polycrystalline silicon is constructed with a heating applicator, a vertical fluidized bed quartz reactor within the applicator, a microwave generator, microwave guide tubes for conveying microwaves from the microwave generator to the applicator, a reacting gas

An apparatus for preparing high-purity polycrystalline silicon is constructed with a heating applicator, a vertical fluidized bed quartz reactor within the applicator, a microwave generator, microwave guide tubes for conveying microwaves from the microwave generator to the applicator, a reacting gas inlet and outlet, a gas distribution device for distributing reacting gas within the reactor, a silicon seed inlet for introducing silicon seed into the reactor, and an outlet for withdrawing polycrystalline silicon from the reactor. The microwaves provide the heat for the fluidized bed reaction.

대표청구항 ▼

An apparatus for the preparation of high-purity polycrystalline silicon, comprising applicator means, an elongated reactor means installed within said applicator means with the longitudinal axis of the reactor means being vertically disposed, said reactor means having an upper portion a microwave sh

An apparatus for the preparation of high-purity polycrystalline silicon, comprising applicator means, an elongated reactor means installed within said applicator means with the longitudinal axis of the reactor means being vertically disposed, said reactor means having an upper portion a microwave shield disposed between said upper and lower portions of said reactor means, and a lower portion, feeding means at the upper portion of said reactor means for introducing silicon seed into said reactor means, gas inlet means connected to the lower portion of said reactor means for introducing a silicon-reacting gas into said reactor means, gas outlet means in the upper portion of said reactor means a joint-seal means between said gas outlet means and said applicator means, said joint-seal means comprising a spring means and a gasket which is biased by said spring means, gas distributor means at the lower portion of said reactor means connected to said gas inlet means and distributing said gas into said reactor means so as to form a fluidized bed of said silicon particles in the lower portion of said reactor means above said gas distributor means as the gas flows through the reactor to said gas outlet means, a microwave generator, at least two microwave guide tubes connecting said microwave generator to said applicator means at a position opposite said lower portion of said reactor means to thereby introduce microwave energy on opposite sides of said reactor means to thereby introduce microwaves into opposite sides said reactor means to said lower portion of said reactor means to effect disposition of silicon from the silicon reacting gas into said silicon seed in the fluidized bed to thereby form high-purity polycrystalline particles gas cut-off membrane means in said microwave guide tubes, and cooling means for cooling said gas distributing means to maintain said gas distribution means at a temperature to prevent substantial deposition of silicon on said gas distribution means.