초록 ▼

An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representat

An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representative thereof; normalizing the near-specular signal with respect to the far-specular signal to indicate a pit; and discriminating the near-specular components of the normalized signal representative of surface pits.

대표청구항 ▼

A detection system for uniquely defining pits on a smooth surface comprising: means for directing a beam of radiation to a surface; means for separately sensing radiation scattered from the surface in the near-specular region and in the far-specular region and producing signals representative thereo

A detection system for uniquely defining pits on a smooth surface comprising: means for directing a beam of radiation to a surface; means for separately sensing radiation scattered from the surface in the near-specular region and in the far-specular region and producing signals representative thereof; means, responsive to said means for sensing, for normalizing the near-specular signal with respect to the far-specular signal to provide a normalized near-specular signal; and means for discriminating the near-specular components of said normalized signal representative of surface pits.