초록 ▼

A method of manufacturing a multilayer ceramic using Cu as the conductor material is disclosed. This method comprises a step of forming a multilayer laminate by the green tape multilayer laminating method or by the thick film printing method on ceramic substrate with an insulating material with a mi

A method of manufacturing a multilayer ceramic using Cu as the conductor material is disclosed. This method comprises a step of forming a multilayer laminate by the green tape multilayer laminating method or by the thick film printing method on ceramic substrate with an insulating material with a mixture of ceramic and glass containing lead oxide as its main component and a conductor paste with CuO as its main component; a step of heat-treatment for decomposing and removing organic binder in air (binder removing process); a step of causing reduction at temperatures where copper oxide is reduced, but lead oxide is not, in a mixed gas atmosphere of nitrogen and hydrogen (reduction process); and a step of firing in a nitrogen atmosphere, thereby effecting sintering of the insulating material composed of ceramic and glass containing lead oxide and metallization of copper electrodes (firing process). For the uppermost layer electrodes, metal copper paste is employed, and a pattern printing process is conducted subsequent to the aforementioned reduction process, so that the sintering of the insulating material and the metallization of the uppermost layer are simultaneously performed; in this way, highly reliable uppermost layer Cu electrodes are obtainable.

대표청구항 ▼

A method of manufacturing a multilayer ceramic substrate comprising the steps of: producing a multilayer laminate by preparing a plurality of green tapes each being made of a mixed composition of ceramic and glass containing lead oxide with addition of at least an organic binder and a plasticizer, f

A method of manufacturing a multilayer ceramic substrate comprising the steps of: producing a multilayer laminate by preparing a plurality of green tapes each being made of a mixed composition of ceramic and glass containing lead oxide with addition of at least an organic binder and a plasticizer, forming on each of the plurality of green tapes a pattern of a paste containing cupric oxide (CuO) as its main component, and laminating the thus obtained green tapes; removing the organic binder in the multilayer laminate by heating the multilayer laminate in air at a temperature at which the organic binder is decomposed and scattered; reducing cupric oxide (CuO) to copper (Cu) by heating the multilayer laminate in a mixed gas atmosphere of hydrogen and nitrogen at a temperature within the range at which cupric oxide is reduced but lead oxide is not reduced; and sintering the multilayer laminate in a nitrogen atmosphere.