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A transport container with an interchangeable, bipartite inside container includes an outside hood, an outside bottom plate, an inside hood, an inside bottom plate, two closing levers, a sealing element and a semiconductor holder. A filter element is built into the container to provide a particle-ty

A transport container with an interchangeable, bipartite inside container includes an outside hood, an outside bottom plate, an inside hood, an inside bottom plate, two closing levers, a sealing element and a semiconductor holder. A filter element is built into the container to provide a particle-type transportation container for transporting and storing semiconductor wafers in a semiconductor wafer cassette and for use in differing air pressure conditions and air purity conditions.

대표청구항 ▼

A transport container for transporting and storing semiconductor wafers in a semiconductor wafer cassette, comprising: an outside hood; an outside bottom plate; an inside hood; an inside bottom plate that forms a closed inside container with said inside hood; first and second closing levers for non-

A transport container for transporting and storing semiconductor wafers in a semiconductor wafer cassette, comprising: an outside hood; an outside bottom plate; an inside hood; an inside bottom plate that forms a closed inside container with said inside hood; first and second closing levers for non-positive closing of said outside hood with said outside bottom plate; a sealing element for air-tight closure of said transport container; and an interchangeable semiconductor wafer holder secured to said inside hood and hingedly moveable relative to said transporting container.