초록 ▼

The invention comprises an interferometric load sensor, or force balance 10 which utilizes etalons 12, 14 to form a reflective cavity 16. A fringe pattern is formed in cavity 16 by light from laser source 26. One of the etalons (14) is mounted to a section 20 that is sensitive to the application of

The invention comprises an interferometric load sensor, or force balance 10 which utilizes etalons 12, 14 to form a reflective cavity 16. A fringe pattern is formed in cavity 16 by light from laser source 26. One of the etalons (14) is mounted to a section 20 that is sensitive to the application of a force 22. Flexing of cantilever 24 due to application of force 22 on section 20 changes the air gap wedge angle between the etalons 12, 14 and thereby shifts the fringe field formed in cavity 16. The shift in the fringe field is observed by light detectors 30, 32.

대표청구항 ▼

An interferometric sensor comprising: (a) a rigid support fixture secured to an underlying structure; (b) a load sensitive fixture connected to said rigid support fixture by a beam to flexing and secured to the underlying structure; (c) a first right angle prism affixed to said rigid support, said f

An interferometric sensor comprising: (a) a rigid support fixture secured to an underlying structure; (b) a load sensitive fixture connected to said rigid support fixture by a beam to flexing and secured to the underlying structure; (c) a first right angle prism affixed to said rigid support, said first prism having a partially reflective exterior surface, a totally reflective interior surface and a substantially non-reflective exterior surface; (d) a second right angle prism affixed to said load sensitive fixture, said second prism having a partially reflective exterior surface, a totally reflective interior surface and a non-reflective exterior surface wherein said partially reflective exterior surfaces of said first and second prisms are parallel and adjacent to each other such that the air gap wedge angle therebetween is less than 5 seconds; (e) a light source for projecting a collimated beam of light through said prisms; and (f) detector means for detecting changes in light intensity of light transmitted through said prisms as caused by angular movement of the prisms relative to each other which is a result of strain in the underlying structure, said movement resulting in a changed air gap wedge angle therebetween wherein said detector means is relatively insensitive to non-angular relative movement between said prisms and said light source so that the sensor is particularly sensitive to strain in the underlying structure.