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Box door actuated retainer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65B-001/04
출원번호 US-0686443 (1984-12-24)
발명자 / 주소
  • Maney George A. (Palo Alto CA) Faraco W. George (Saratoga CA) Parikh Mihir (San Jose CA)
출원인 / 주소
  • Asyst Technologies, Inc. (Milpitas CA 02)
인용정보 피인용 횟수 : 51  인용 특허 : 11

초록

A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box door for being received by the box opening; a cassette for holding the articles, the cassette supported

대표청구항

A transportable container for articles to be processed, for use with passage means for passing said articles between locations, comprising: a box defining a box opening; a box door for being received by said box opening; holder means for holding one or more articles, said holder means supported by s

이 특허에 인용된 특허 (11)

  1. Uehara Akira (Yokohama JPX) Kiyota Hiroyuki (Hiratsuka JPX) Miyazaki Shigekazu (Sagamihara JPX) Nakane Hisashi (Kawasaki JPX), Apparatus for automatic semi-batch sheet treatment of semiconductor wafers by plasma reaction.
  2. Hudgins Jerry L. (Guntersville AL), Apparatus for sequentially transporting containers.
  3. Hackney Stanley (Appleton GB2), Apparatus for transferring toxic and radioactive materials.
  4. Cuthbertson ; Jim P. ; Bamburg ; Robert A. ; Duncan ; Farris N. ; Floyd ; Roger M., Bottom unloading bulk container.
  5. Ware Richard L. (433 E. Hardy ; Apartment A Inglewood CA 90301), Disposal device with display panels.
  6. Fujii Takashi (Toyota JPX) Nakamura Hiroyuki (Toyota JPX) Souma Teruo (Toyota JPX), Dual-part cap assembly for sealed fluid reservoirs.
  7. Tullis Barclay J. (Palo Alto CA) ..AP: Hewlett-Packard Company (Palo Alto CA 02), Interlocking door latch for dockable interface for integrated circuit processing.
  8. Koch George R. (Los Altos CA) Petersen ; III Carl T. (Fremont CA), Modular loadlock.
  9. Tullis Barclay J. (Palo Alto CA) Parikh Mihir (San Jose CA) Thrasher David L. (Menlo Park CA) Johnston Mark E. (Saratoga CA), Particle-free dockable interface for integrated circuit processing.
  10. , Particle-free dockable interface for integrated circuit processing.
  11. Gerlach Robert L. (Minnetonka MN) Seibel David D. (Lakeville MN) Miller Mark C. (Chanhassen MN), Sample transport system.

이 특허를 인용한 특허 (51)

  1. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Apparatus for automated cassette handling.
  2. Muka Richard S. (Topsfield MA) Pippins Michael W. (Hamilton MA) Drew Mitchell A. (Portsmouth NH), Batchloader for substrate carrier on load lock.
  3. Bhatt, Sanjiv M.; Eggum, Shawn D., Composite substrate carrier.
  4. Bhatt, Sanjiv M.; Eggum, Shawn D., Composite substrate carrier.
  5. Bhatt,Sanjiv M.; Eggum,Shawn D., Composite substrate carrier.
  6. Pelissier Laurent (Grenoble FRX), Device for carrying out sequential thermal treatments under a vacuum.
  7. Schultz, Klaus; Schulz, Alfred; Mages, Marlies, Docking station for substrate transport containers.
  8. Muka Richard S. (Topsfield MA), Door drive mechanisms for substrate carrier and load lock.
  9. Chiu, Ming-Chien; Lu, Pao-Yi; Hung, Kuo Chun, FOUP and robotic flange thereof.
  10. Mills, William C.; Rabe, Richard A., Glove box for water pit applications.
  11. Durben, Joseph A.; Rider, Gavin Charles; Lindsley, Robert K., High cleanliness article transport system.
  12. Durben, Joseph A.; Rider, Gavin Charles; Lindsley, Robert K., High cleanliness article transport system.
  13. Duban-Hu, Joy; Nigg, James; Wiseman, Brian, Horizontal cassette.
  14. Ping King-Ho (Tainan TWX) Lee Jin-Yuan (Hsin-Chu TWX), Integrated circuit module fixing method for temperature cycling test.
  15. Chiba Yuji (Isehara JPX) Fujioka Hidehiko (Atsugi JPX) Mizusawa Nobutoshi (Yamato JPX) Kariya Takao (Hino JPX) Shimoda Isamu (Zama JPX), Mask cassette and mask cassette loading device.
  16. Paul E. Lewis ; Adel George Tannous ; Karl A. Davlin, Method and apparatus for processing tool interface in a manufacturing environment.
  17. Paul E. Lewis ; Adel George Tannous ; Karl A. Davlin, Method and apparatus for processing tool interface in a manufacturing environment.
  18. Tullis Barclay J. (Palo Alto CA) Bailey John S. (Sunnyvale CA) Gunawardena D. R. (Union City CA) Kaempf Ulrich (Los Altos CA), Method for automated cassette handling.
  19. Babbs, Daniel; Ewald, Timothy; Coady, Matthew; Fosnight, William J., Modular sorter.
  20. Lewis Lynn Armentrout, Photolithography system including a SMIF pod and reticle library cassette designed for ESD protection.
  21. Bhatt, Sanjiv M.; Eggum, Shawn D., Process for fabricating composite substrate carrier.
  22. Mastroianni Sal, Process for forming a semiconductor device.
  23. De Ridder, Christianus Gerardus Maria; den Hartog, Edwin, Processing system with increased cassette storage capacity.
  24. Paul E. Lewis ; Adel George Tannous ; Karl A. Davlin ; Khalid Makhamreh, Processing tool interface apparatus for use in manufacturing environment.
  25. Tieben, Anthony Mathius; Halbmeier, David L.; Kolbow, Steven P., Purge system for a substrate container.
  26. Bacchi Paul ; Filipski Paul S., SMIF box cover hold down latch and box door latch actuating mechanism.
  27. Bacchi Paul ; Filipski Paul S., SMIF box cover hold down latch and box door latch actuating mechanism.
  28. Bonora Anthony C. (Menlo Park CA) Rosenquist Frederick T. (Redwood City CA), Sealable transportable container having improved latch mechanism.
  29. Bonora Anthony C. (Menlo Park CA) Wartenbergh Robert P. (Woodside CA) Jain Sudhir (Fremont CA) Davis Mark R. (Mountain View CA), Sealable transportable container having improved liner.
  30. Bacchi, Paul; Filipski, Paul S., Semiconductor processing tool alignment technique implemented in a FIMS system.
  31. Gallagher Gary M. (Colorado Springs CO) Wittman Boyd C. (Colorado Springs CO) Neumann Edmund B. (Corvallis OR), Semiconductor wafer cassette transport box.
  32. Chen, Kuan Chou; Wu, Tzong Ming, Six-bar linkage positioning mechanism.
  33. Hofmeister Christopher, Substrate carrier as batchloader.
  34. Tieben, Anthony Mathius; Lystad, John; Halbmaier, David L., Substrate container with fluid-sealing flow passageway.
  35. Tieben,Anthony Mathius; Lystad,John; Halbmaier,David L., Substrate container with fluid-sealing flow passageway.
  36. Aggarwal, Ravinder; Stoutjesdijk, Jeroen, Substrate handling chamber with movable substrate carrier loading platform.
  37. Walker Delroy (Springdale MD) Zihmer Joseph (Frederick MD) Furches Danny (Columbia MD) Garmer Christopher J. (Rockville MD), System for transferring articles between controlled environments.
  38. Gentischer Josef (Weinbergweg 31 73630 Remshalden DEX), System for transferring substrates into clean rooms.
  39. Nyseth David L. ; Krampotich Dennis J. ; Ulschmid Todd M. ; Bores Gregory W., Transport module.
  40. Nyseth, David L.; Krampotich, Dennis J.; Ulschmid, Todd M.; Bores, Gregory W., Transport module.
  41. Nyseth,David L.; Krampotich,Dennis J.; Ulschmid,Todd M.; Bores,Gregory W., Transport module.
  42. Nyseth David L. ; Krampotich Dennis J., Transport module with latching door.
  43. Iwai Hiroyuki,JPX ; Tanifuji Tamotsu,JPX ; Asano Takanobu,JPX ; Okura Ryoichi,JPX, Treatment apparatus.
  44. Ono Yuji,JPX ; Mihara Katsuhiko,JPX, Treatment system and treatment apparatus with multi-stage carrier storage chambers.
  45. Nyseth David L., Wafer carrier.
  46. Nyseth David L., Wafer carrier with door.
  47. Howells John ; Niemeyer ; III Robert H., Wafer cassette rotation mechanism.
  48. Nyseth, David L., Wafer container with minimal contact.
  49. Fan Horng-Kuang,TWX ; Huang Gwo-Jou,TWX ; Lee Jyh-Jone,TWX, Wafer retaining mechanism.
  50. Wu Tzong-Ming,TWX ; Huang Gwo-Jou,TWX, Wafer retaining mechanism.
  51. Pai,Wei Ming; Chen,Dar Zen; Lee,Jyh Jone; Wu,Tzong Ming; Lin,Hui Chih, Workpiece holder for clean container.
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