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특허 상세정보

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Reactor for fluidized bed silane decomposition

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01J-008/18   
미국특허분류(USC) 422/145 ; 422/146 ; 422/199
출원번호 US-0760572 (1985-07-30)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 37  인용 특허 : 2
초록

An improved heated fluidized bed reactor and method for the production of high purity polycrystalline silicon by silane pyrolysis wherein silicon seed particles are heated in an upper heating zone of the reactor and admixed with particles in a lower zone, in which zone a silane-containing gas stream, having passed through a lower cooled gas distribution zone not conducive to silane pyrolysis, contacts the heated seed particles whereon the silane is heterogeneously reduced to silicon.

대표
청구항
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An improved fluidized bed silane pyrolysis reactor comprising: (a) A vessel having a vertically oriented generally cylindrical wall surrounding a reaction chamber which is adapted to be heated to effect pyrolysis of silane, said vessel being closed to the atmosphere and having an inlet located at the lower end of the vessel for introducing into said reaction chamber a silane and/or halosilane-containing feed gas stream and an outlet located at the upper end of the vessel for discharging said gas stream and the gaseous by-products of the silane and/or hal...

이 특허에 인용된 특허 (2)

  1. Gansauge Jost (Burghausen DEX) Muschi Johann (Munich DEX) Freudlsperger Hans (Neuotting DEX). Fluidized bed reactor. USP1979124176710.
  2. Padovani Francois A. (Dallas TX). Silicon seed production process. USP1980064207360.

이 특허를 인용한 특허 피인용횟수: 37

  1. Adris, Alaa Eldin M.; Al-Sherehy, Fahad A.; Soliman, Mustafa A.; Hakeem, Tarique; Kareemuddin, Shickh; Al-Nutaifi, Abdullah A.; Saudagar, Munawwar; Azam, Shahid M.. Apparatus for the controlled optimized addition of reactants in continuous flow reaction systems. USP2005126977064.
  2. Flowers, Mitchell; Wood, Simon; Milligan, James W.. Bandwidth limiting methods for GaN power transistors. USP2017059641163.
  3. Adris,Alaa Eldin M.; Al Sherehy,Fahad A.; Soliman,Mustafa A.; Hakeem,Tarique; Kareemuddin,Shickh; Al Nutaifi,Abdullah A.; Saudagar,Munawwar; Azam,Shahid M.. Continuous flow reaction systems with controlled addition of reactants. USP2008117445758.
  4. Sansegundo-Sanchez, Javier; Benavides-Rel, Xavier; Vales-Canle, Manuel; Tomas-Martinez, Maria. Cooled gas distribution plate, thermal bridge breaking system, and related methods. USP2014118875728.
  5. Adler, Peter; Pirzl, Wolfgang; Sonnenschein, Raymund. Device and process for the deposition of ultrafine particles from the gas phase. USP2010097799274.
  6. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas. Fluidized bed reactor for production of high purity silicon. USP2012058168123.
  7. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas. Fluidized bed reactor for production of high purity silicon. USP2012048158093.
  8. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Fluidized bed reactor systems. USP2014128906313.
  9. Erk, Henry F.. Fluidized bed reactor systems and distributors for use in same. USP2014098828324.
  10. Lord, Stephen M. Machine for production of granular silicon. USP2004126827786.
  11. Takahiro Horiuchi JP; Kiyofumi Morimoto JP. Method and apparatus for modifying particles. USP2002106468352.
  12. Frederick Schmid ; Chandra P. Khattak ; David B. Joyce. Method and apparatus for purifying silicon. USP2002046368403.
  13. Block, Hans-Dieter; Kr?uter, Udo; Schreckenberg, Peter. Method and device for producing globular grains of high-puroty silicon having a diameter of between 50 μm and 300 μm and use of the same. USP2005106951637.
  14. Herold, Heiko; Holdenried, H. Günter; Mleczko, Leslaw; Pfaffelhuber, Matthias; König, Karl Theodor. Method for producing highly pure, granular silicon in a fluidised bed. USP2009067553466.
  15. Metzger,Karl Ludwig; Mleczko,Leslaw; Buchholz,Sigurd; Schlichth채rle,Philipp. Method for producing highly purified, granular silicium. USP2006027001579.
  16. Schmid Frederick ; Khattak Chandra P.. Method for purifying silicon. USP1999105972107.
  17. Stephen M Lord. Method of improving the efficiency of a silicon purification process. USP2002096451277.
  18. Froehlich, Robert; Mixon, David. Methods and system for cooling a reaction effluent gas. USP2012088235305.
  19. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Methods for introducing a first gas and a second gas into a reaction chamber. USP2014058728574.
  20. Gupta, Puneet; Erk, Henry F.; Grabbe, Alexis. Methods for producing silane. USP2015038974761.
  21. Gupta, Puneet; Erk, Henry F.; Grabbe, Alexis. Methods for producing silane. USP2014098821825.
  22. Sanjurjo Angel (San Jose CA). Process for producing crystalline silicon ingot in a fluidized bed reactor. USP1991045006317.
  23. Poepken, Tim; Sonnenschein, Raymund. Process for producing silicon. USP2009127632478.
  24. Gupta, Puneet; Huang, Yue; Bhusarapu, Satish. Production of polycrystalline silicon in substantially closed-loop processes that involve disproportionation operations. USP2015028956584.
  25. Gupta, Puneet; Huang, Yue; Bhusarapu, Satish. Production of polycrystalline silicon in substantially closed-loop systems that involve disproportionation operations. USP2014058715597.
  26. Chu, Xi. Reactor and method for producing high-purity granular silicon. USP2013098535614.
  27. Filtvedt, Josef; Filtvedt, Werner O.. Reactor and method for production of silicon. USP2015109156704.
  28. Filtvedt, Werner O.; Filtvedt, Josef. Reactor and method for production of silicon by chemical vapor deposition. USP2017109793116.
  29. Froehlich, Robert; Fieselmann, Ben; Mixon, David; Tsuo, York. Reactor with silicide-coated metal surfaces. USP2013048425855.
  30. Lord Stephen M. ; Milligan Robert J.. Silicon deposition reactor apparatus. USP1998095810934.
  31. Arvidson, Arvid Neil; Molnar, Michael. Silicon production with a fluidized bed reactor integrated into a Siemens-type process. USP2013128609058.
  32. Akira Ishikawa. Spherical shaped semiconductor integrated circuit. USP2002116486071.
  33. Ishikawa Akira. Spherical shaped semiconductor integrated circuit. USP1999126004396.
  34. Gupta, Puneet; Erk, Henry F.; Grabbe, Alexis. Systems for producing silane. USP2016119487406.
  35. Gupta, Puneet; Erk, Henry F.; Grabbe, Alexis. Systems for producing silane. USP2015049011803.
  36. Gupta, Puneet; Erk, Henry; Grabbe, Alexis. Systems for producing silane. USP2013038388914.
  37. Adris, Alaa Eldin Mostafa; Gutlhuber, Friedrich. Tubular reactor with gas injector for gas phase catalytic reactions. USP2004116818189.

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