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Method and apparatus for monitoring the location of wafer disks

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-015/46
출원번호 US-0061935 (1987-06-11)
발명자 / 주소
  • Rossi Alexander N. (Pleasanton CA) Sancen Mario N. (Antioch CA)
출원인 / 주소
  • Fluoroware, Inc. (Chaska MN 02)
인용정보 피인용 횟수 : 40  인용 특허 : 1

초록

A method and system for monitoring the process of a plurality of batches of semiconductor wafers or memory disks through a series of processing operations. Each batch is placed in a carrier in which it is transported to the locations where the processing operations are performed. Each carrier is pro

대표청구항

A method for monitoring the progress of a plurality of batches of disks through a multiplicity of operations at several locations comprising the steps of: inserting each batch of disks into a carrier constructed and arranged for supporting the disks in a parallel, axially arranged spaced array; prov

이 특허에 인용된 특허 (1)

  1. Slobodin Leo (Holmdel NJ), Electronic identification system.

이 특허를 인용한 특허 (40)

  1. Chiang, Wen-Hsiang; Fan, Tzu-Chung; Chi, Shih-Ti; Huang, Jui-Ching; Fan, Shieng Chiang; Yi, Chi-Ming, Depository monitoring system in semiconductor storage warehouse.
  2. Cheesebrow Nicholas T. ; Eggum Shawn D. ; Kos Robert D. ; Williams Randy S., Disk carrier with transponder.
  3. Tuttle, Mark E., Electronic communication devices, methods of forming electrical communication devices, and communications methods.
  4. Marsh Michael John Camille,ZAX ; Lenarcik Andrzej,ZAX, Electronic identification system confirming valid code.
  5. Asp, Wayne; McKenzie, Jeffrey J.; Hennen, John M., Identification tag for fluid containment drum.
  6. Dressen Larry G., Location monitoring of wafer batches.
  7. Charles, Alain; Maltabes, John; Mautz, Karl, Manufacturing system method for processing a lithography mask container.
  8. Hachtmann,Bruce, Memory disk shipping container with improved contaminant control.
  9. Magoon, Paul J.; Ramirez, Raul A.; Batchelder, Traci L., Method and system for controlling operation of a pump based on filter information in a filter information tag.
  10. Magoon, Paul J.; Ramirez, Raul A.; Batchelder, Traci L., Method and system for controlling operation of a pump based on filter information in a filter information tag.
  11. Cedrone, James; Gonnella, George; Gashgaee, Iraj; Stankowski, Ralph J., Method and system for high viscosity pump.
  12. Magoon, Paul J.; Ramirez, Raul A.; Braggin, Jennifer M., Method and system for optimizing operation of a pump.
  13. Braggin, Jennifer M.; Inui, Shiho; Chow, Wailup; Wu, Aiwen, Method and system for pump priming.
  14. Van Antwerp ; Jr. Kenneth D. ; Hardee Bedford E. ; Myers Dennis L., Method for electronically tracking containers to avoid misprocessing of contents.
  15. Frary James M. ; Leonhardt Michael L. ; Smith Archibald W., Method for storing multiple logical data volumes on a single physical volume utilizing writable labels and physical vol.
  16. Asp, Wayne; McKenzie, Jeffrey J.; Hennen, John M., Method of filling a drum having an RFID identification tag.
  17. Tuttle Mark E. ; Tuttle John R. ; Lake Rickie C., Method of manufacturing an enclosed transceiver.
  18. Tuttle Mark E. ; Tuttle John R. ; Lake Rickie C., Method of manufacturing an enclosed transceiver.
  19. Tuttle Mark E. ; Tuttle John R. ; Lake Rickie C., Method of manufacturing an enclosed transceiver.
  20. Tuttle Mark E. ; Tuttle John R. ; Lake Rickie C., Method of manufacturing an enclosed transceiver.
  21. Tuttle Mark E. ; Tuttle John R. ; Lake Rickie C., Method of manufacturing an enclosed transceiver.
  22. Tuttle, Mark E.; Tuttle, John R.; Lake, Rickie C., Method of manufacturing an enclosed transceiver.
  23. Tuttle,Mark E.; Lake,Rickie C., Methods for forming integrated circuits within substrates.
  24. Mimura, Hiroshi; Niiya, Wataru; Kamada, Toshiyuki, Precision substrate storage container.
  25. Wu, Kung Chris; Wu, Chen; Huang, Chien-Rong; Hsu, Jui-Hung, Radio frequency identification device.
  26. Tuttle, John R., Radio frequency identification device and method.
  27. Tuttle, John R., Radio frequency identification device and method.
  28. Tuttle, John R., Radio frequency identification device and method.
  29. Mabry Frank Robert ; Rhodes James Scott, Radio frequency identification system and method for tracking silicon wafers.
  30. Takayama Yoshihisa,JPX ; Kusakabe Susumu,JPX, Recording medium handling apparatus.
  31. Martin, Raymond S., Smart load port with integrated carrier monitoring and fab-wide carrier management system.
  32. Tuttle, John R., System and method to track articles at a point of origin and at a point of destination using RFID.
  33. McCabe Arthur Barney ; Tuttle John R. ; Wood ; Jr. Clifton W., Tamper resistant smart card and method of protecting data in a smart card.
  34. Tuttle John R. ; Wood ; Jr. Clifton W. ; McCabe Arthur Barney, Tamper resistant smart card and method of protecting data in a smart card.
  35. Tuttle John R. ; Wood ; Jr. Clifton W. ; McCabe Arthur Barney, Tamper resistant smart card and method of protecting data in a smart card.
  36. Tuttle,John R., Thin flexible, RFID labels, and method and apparatus for use.
  37. Tuttle,John R., Thin, flexible, RFID label and system for use.
  38. Speasl, Jerry A.; Dante, Edward, Transportable container including an internal environment monitor.
  39. Speasl,Jerry A.; Dante,Edward, Transportable container including an internal environment monitor.
  40. Speasl,Jerry A.; Dante,Edward, Transportable container including an internal environment monitor.
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