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Metal diaphragm valve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-007/17
출원번호 US-0114162 (1987-10-27)
우선권정보 JP-0258515 (1986-10-31)
발명자 / 주소
  • Ohmi Tadahiro (Sendai JPX) Kanno Yohichi (Sendai JPX) Uchisawa Osamu (Sendai JPX) Sato Kazuhiko (Izumi JPX)
출원인 / 주소
  • Motoyama Eng. Works, Lts (Sendai JPX 03)
인용정보 피인용 횟수 : 39  인용 특허 : 0

초록

A metal diaphragm valve in which the interior of a valve casing is divided, by means of a metal diaphragm, thereby defining a valve chamber. Inlet hole and outlet hole are connected to the valve chamber. A valve seat is provided between the inlet and outlet holes, inside the valve chamber. A valve d

대표청구항

A metal diaphragm valve for a high-purity fluid which has a valve passage whose surface is mirrorfinished, said metal diaphragm valve comprising: a casing having a casing chamber formed therein and inlet and outlet holes each having one end connected to the casing chamber and the other end opening t

이 특허를 인용한 특허 (39)

  1. Wu Jing-Chau ; Barber Patrick P. ; Aldridge Lewis L., All metal diaphragm valve.
  2. Maiefski, Romaine; Wendell, Don; Ripka, William C.; Krakover, Jonathan D., Apparatus and method for multiple channel high throughput purification.
  3. Ollivier Louis A., Apparatus for delivering process gas for making semiconductors and method of using same.
  4. Takahashi, Eiji; Sasaki, Norikazu; Sawachi, Atsushi; Sawada, Yohei; Ikeda, Nobukazu; Dohi, Ryousuke; Nishino, Kouji, Apparatus for dividing and supplying gas and method for dividing and supplying gas.
  5. Hertzler,Benjamin Lee; Shay,Robert Harrison; Botelho,Alexandre de Almeida, Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor.
  6. Nickerson Mark A. (Landenberg PA) Poole John S. (Landenberg PA) Frank Lenore G. R. (Landenberg PA), Axially-driven valve controlled fluid trapping assembly.
  7. Kingsford Kenji A. ; Chan Anthony K. T. ; Fregoso Mario ; Martinez David R., Compact valve with rolling diaphragm poppet.
  8. Noyes, Douglas B.; Briley, Jr., Leslie L.; Glew, Alexander, Control valves.
  9. Gotch James E. ; Kitchen Dale J. ; Longo Maria T. ; Rasanow Victor N. ; Smith Philip J., Diaphragm valve.
  10. Kitano, Taichi; Kiso, Hidenori; Shinohara, Tsutomu, Diaphragm valve.
  11. Kitano, Taichi; Shinohara, Tsutomu; Yamaji, Michio; Nishimura, Ryutaro, Diaphragm valve and seat holder unit for diaphragm valve.
  12. Gotch James E. ; Kitchen Dale J. ; Longo Maria T. ; Rasanow Victor N. ; Smith Philip J., Diaphragm valve seat arrangement.
  13. Kanno Yohichi,JPX ; Uchisawa Osamu,JPX ; Yamashima Jun,JPX, Diaphragm valve structure.
  14. Crockett, Mark; DeChellis, Michael, Diaphragm valve with dynamic metal seat and coned disk springs.
  15. Tanikawa, Tsuyoshi; Yamaji, Michio; Yakushijin, Tadayuki; Fukuchi, Hiroshi, Direct touch type metal diaphragm valve.
  16. Wang, Tak Kui, Extended range diaphragm valve and method for making same.
  17. Gu, Youfan; Nuesken, Sven, Fast-acting pneumatic diaphragm valve.
  18. Louis A. Ollivier, Flow control of process gas in semiconductor manufacturing.
  19. Louis A. Ollivier, Flow control of process gas in semiconductor manufacturing.
  20. Tanikawa,Tsuyoshi; Yakushijin,Tadayuki, Fluid controller.
  21. Friedman, Mitchell A., Fluid dispensing system and dual-mode, system fluid actuated valve for use therein.
  22. Louis A. Ollivier, Fluid pressure regulator with differential pressure setting control.
  23. Kimura Miyoshi,JPX, Gas controlling device for integration.
  24. Ohmi Tadahiro,JPX ; Kagatsume Satoshi,JPX ; Ikeda Nobukazu,JPX ; Nishino Kouji,JPX ; Yoshikawa Kazuhiro,JPX ; Ideta Eiji,JPX ; Dohi Ryousuke,JPX ; Uno Tomio,JPX ; Yamaji Michio,JPX, Gas supply system equipped with pressure-type flow rate control unit.
  25. Barber Patrick P. ; Tai Shiaw-wen, High flow diaphragm valve.
  26. Wu Jing-Chau ; Barber Patrick P. ; Aldridge Lewis L., High pressure actuated metal seated diaphragm valve.
  27. Otteman John H. (4005 Hecker Pass Hwy. Gilroy CA 95020), Linear actuator.
  28. Ohmi Tadahiro (Sendai JPX) Kanno Yohichi (Sendai JPX) Satoh Kazuhiko (Sendai JPX) Hatayama Tadahiro (Sendai JPX), Metal diaphragm valve.
  29. Crockett, Mark; Lane, John W.; Kirchhoff, Vincent; Josephson, Marcel E.; Gao, Hong P.; Manjunath, Bhaswan, Method of diffusion bonding a fluid flow apparatus.
  30. Romaine Maiefski, Microsampling apparatus and method for multiple channel high throughout purification.
  31. Ochs Paul (19 Tall Timber Dr. Morristown NJ 07960), Piston actuated pressure reducing valve.
  32. Romaine Maiefski, Pressure regulation apparatus and method for multiple channel high throughput purification.
  33. Schieber Richard H., Radial flow diaphragm valve.
  34. Fedegari,Fortunato, Sanitary diaphragm valve.
  35. Kojima,Yasuhiko; Mori,Hiroyuki; Ono,Hirofumi, Semiconductor manufacturing system having a vaporizer which efficiently vaporizes a liquid material.
  36. Lonnes,Steven B., Slurry tolerant pilot operated relief valve.
  37. Pearlstein,Ronald Martin; Langan,John Giles; Zheng,Dao Hong; Irven,John; Hertzler,Benjamin Lee, Sub-atmospheric gas delivery method and apparatus.
  38. Moses, Erhard; Wallbaum, Torsten, Tank safety valve.
  39. Fukano, Yoshihiro; Uchino, Tadashi, Two-way valve.
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