초록 ▼

A pressure transmitter assembly includes a laminated ceramic structure for providing fluid passages as well as a support for a pressure sensor, electronic circuitry, fluid barrier diaphragms and input process fluid connections. The laminated structure is comprised of a plurality of co-fired ceramic

A pressure transmitter assembly includes a laminated ceramic structure for providing fluid passages as well as a support for a pressure sensor, electronic circuitry, fluid barrier diaphragms and input process fluid connections. The laminated structure is comprised of a plurality of co-fired ceramic layers having the fluid passages molded therein to enable fill fluids within the assembly to apply input pressures as a differential pressure across the pressure sensor. In one embodiment of the invention, three ceramic layers are used while a second embodiment uses four layers with an overload diaphragm captured between two of the layers. The laminated ceramic structure can be extended in either embodiment to include an outer ceramic circuit board which is bonded with a fluid-tight interface with an adjacent one of the other ceramic layers. Electronic components are mounted on the circuit board, either before or after bonding, which also provides a capability for further fluid passages extending between the circuit board and an adjacent ceramic layer.

대표청구항 ▼

A pressure transmitter comprising a pressure sensor means for providing an output signal representative of a differential pressure applied thereacross, a first diaphragm means for developing a first fluid pressure representative of a first input pressure applied thereto, a second diaphragm means for

A pressure transmitter comprising a pressure sensor means for providing an output signal representative of a differential pressure applied thereacross, a first diaphragm means for developing a first fluid pressure representative of a first input pressure applied thereto, a second diaphragm means for developing a second fluid pressure representative of a second input pressure applied thereto and multilayer ceramic means including a plurality of contiguous ceramic layers between said first and second diaphragm means and said sensor means for directing said first and second fluid pressures to said sensor means as a differential pressure thereacross.