초록 ▼

Methods are provided for suppressing the growth of graphite and other non-diamond carbon species during the low pressure deposition of carbon to form diamond. In one method, the graphite or other non-diamond carbon species is vaporized using incident radiative energy sufficient to vaporize graphite

Methods are provided for suppressing the growth of graphite and other non-diamond carbon species during the low pressure deposition of carbon to form diamond. In one method, the graphite or other non-diamond carbon species is vaporized using incident radiative energy sufficient to vaporize graphite but insufficient to damage the substrate. In another embodiment the graphite or other non-diamond carbon species is selectively photolyzed, such as, by use of laser energy of appropriate wavelength.

대표청구항 ▼

A method for suppressing growth of graphite and other non-diamond carbon species during growth of diamond by low pressure vapor deposition of carbon upon a substrate, comprising the step of heating the growing diamond surfaces during deposition with incident radiative energy comprising optical wavel

A method for suppressing growth of graphite and other non-diamond carbon species during growth of diamond by low pressure vapor deposition of carbon upon a substrate, comprising the step of heating the growing diamond surfaces during deposition with incident radiative energy comprising optical wavelengths sufficiently high to vaporize graphite and other non-diamond carbon species formed upon said surfaces but said flux being sufficiently low to avoid substantial physical and chemical damage to said substrate.