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Installation for the storage and transfer of objects in a very clean atmosphere 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-046/10
  • B65B-001/04
출원번호 US-0123355 (1987-11-20)
우선권정보 FR-0016653 (1986-11-28); FR-0012292 (1987-09-04)
발명자 / 주소
  • Lazzari Jean-Pierre (Corenc FRX) Cortial Henri (Sassenage FRX)
출원인 / 주소
  • Commissariat A l\Energie Atomique (Paris FRX 07)
인용정보 피인용 횟수 : 60  인용 특허 : 13

초록

The installation according to the invention includes a cabinet for storing objects, apparatus for processing these objects, apparatus for transferring these objects between the storage cabinet and processing apparatus for the same, constituted by mobile containers and fixed containers fixed to the p

대표청구항

Installation for the storage and transfer of objects with a view to the treatment or processing thereof in an extremely clean atomosphere, said installation being adapted to be placed in a room having an average cleanness level, said installation comprising: (a) storage means for storing the objects

이 특허에 인용된 특허 (13)

  1. Motoda Kenro (Tokyo JPX), Article delivery apparatus.
  2. Rathmann Thomas M. (Rohnert Park CA) Drake Herbert G. (San Rafael CA) Mirkovich Ninko T. (Novato CA) Lachenbruch Roger B. (Petaluma CA), Article transport apparatus.
  3. Tanaka Hirokuni (Ooiso JPX), Clean tunnel conveying structure.
  4. Southworth Peter R. (Mission Viejo CA) Baxter Gregory R. (Orange CA), Conveyor system.
  5. Hutchinson Martin A. (Santa Clara CA), Gate valve for wafer processing system.
  6. Parikh Mihir (San Jose CA) Bonora Anthony C. (Menlo Park CA), Sealable transportable container having a particle filtering system.
  7. Maney George A. (Palo Alto CA) O\Sullivan Andrew W. (Gilroy CA) Faraco W. George (Saratoga CA), Sealed standard interface apparatus.
  8. Southworth, Peter R.; Baxter, Gregory R., Semiconductor wafer transport system.
  9. Bonora Anthony C. (Menlo Park CA), Short arm manipulator for standard mechanical interface apparatus.
  10. Elliott David J. (147 Rice Rd. Wayland MA 01778), Transport containers for semiconductor wafers.
  11. Davis Cecil J. (Greenville TX) Matthews Robert (Plano TX) Hildenbrand Randall C. (Richardson TX), Vacuum processing system.
  12. Purser, Kenneth H., Wafer holding apparatus for ion implantation.
  13. Dimock Jack A. (Santa Barbara CA) Woestenburg Dirk P. (Summerland CA), Wafer processing machine with evacuated wafer transporting and storage system.

이 특허를 인용한 특허 (60)

  1. Siemers, Warren G.; Hamor, Gary D., Adjustable clean-air flow environment.
  2. Lenz, Eric H., Airflow management for low particulate count in a process tool.
  3. Lenz, Eric H., Airflow management for low particulate count in a process tool.
  4. Beaulieu, Martin; Van Den Boom, Dirk J., Allele-specific sequence variation analysis.
  5. Flitsch, Frederick A., Apparatus to support a cleanspace fabricator.
  6. Köster, Hubert; Yip, Ping; Steadman, Jhobe; Reuter, Dirk; MacDonald, Richard, Automated process line.
  7. Ehrich, Mathias; Van Den Boom, Dirk Johannes, Base specific cleavage of methylation-specific amplification products in combination with mass analysis.
  8. Chin, Kyoung-Hwan, Byproducts treating device and a facility for manufacturing semiconductor devices having the byproducts treating device.
  9. Ishihara,Hiroyuki; Shimizu,Takao; Nakao,Takashi; Tahara,Ryosuke; Takeuchi,Hidetoshi, Carrying vehicle, manufacturing apparatus, and carrying system.
  10. French ; Jr. Norman L., Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same.
  11. Norman L. French, Jr., Circuit and apparatus for verifying a chamber seal, and method of depositing a material onto a substrate using the same.
  12. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  13. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  14. Marohl Dan, Compact apparatus and method for storing and loading semiconductor wafer carriers.
  15. Kirkpatrick Thomas I. ; Otwell Robert L., Cost effective modular-linear wafer processing.
  16. Kirkpatrick Thomas I. ; Otwell Robert L., Cost effective modular-linear wafer processing.
  17. Beudon, Didier; Bridenne, Pierre, Device for diffusing sterile air.
  18. Mages, Andreas; Birkner, Andreas; Schulz, Alfred; Schultz, Klaus, Device for manipulating an object for loading and unloading a clean room.
  19. Bonora Anthony C. (Menlo Park CA) Oen Joshua T. (Newark CA), Direct loadlock interface.
  20. Aggarwal, Ravinder K., Docking cart with integrated load port.
  21. Masato M. Toshima ; Phil M. Salzman ; Steven C. Murdoch ; Cheng Wang ; Mark A. Stenholm ; James Howard ; Leonard Hall, Dual cassette load lock.
  22. Masato M. Toshima ; Phil M. Salzman ; Steven C. Murdoch ; Cheng Wang ; Mark A. Stenholm ; James Howard ; Leonard Hall ; David Cheng, Dual cassette load lock.
  23. Toshima, Masato M.; Salzman, Phil M.; Murdoch, Steven C.; Wang, Cheng; Stenholm, Mark A.; Howard, James; Hall, Leonard, Dual cassette load lock.
  24. Vijverberg, Joep Gerard; Plandsoen, Laurens Vincent; van Gelder, Bas; de Boer, Guido; Dansberg, Michel Pieter, Enclosure for a target processing machine.
  25. Bachrach Robert Z., Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers.
  26. Franz, Jochen; Gebauer, Gunter, Filtering apparatus for filtering compressed air.
  27. Richardson, Jr., Donald B.; Knox, Jeffery; Beildeck, Pedro; Kremer, John L., Filtration system for collecting and filtering particles and fumes from ablative imaging plates.
  28. Scannon, Patrick J.; Bernard, Frank; Dadson, Jr., Alfred C.; Tenerowicz, Robert S., Flexible manufacturing system.
  29. van den Boom, Dirk; Boecker, Sebastian, Fragmentation-based methods and systems for sequence variation detection and discovery.
  30. Lenz, Eric H., High throughput cleaner chamber.
  31. Braun,Andreas; Cantor,Charles R.; Kammerer,Stefan M.; Taylor,Susan; Burns Hamuro,Lora; Cook,Charles; Olson,Gary; Self,Christopher, Kinase anchor protein muteins, peptides thereof and related documents.
  32. Yoshimura, Takehiko; Nagata, Tatsuhiko; Seki, Masaru; Cho, Yoshinori, Load port.
  33. Marohl Dan A., Magnetically coupled wafer extraction platform.
  34. Abraham, Michael; Marx, Eckhard, Measurement configuration including a vehicle and method for performing measurements with the measurement configuration at various locations.
  35. Flitsch, Frederick A., Method and apparatus for a cleanspace fabricator.
  36. Flitsch, Frederick A., Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator.
  37. Flitsch, Frederick A., Method and apparatus for an automated tool handling system for a multilevel cleanspace fabricator.
  38. Flitsch,Frederick A., Method and apparatus for an elevator system for a multilevel cleanspace fabricator.
  39. Flitsch, Frederick, Method and apparatus to support a cleanspace fabricator.
  40. Flitsch, Frederick A., Method and apparatus to support process tool modules in a cleanspace fabricator.
  41. Spiegelman, Jeffrey J.; Alvarez, Jr., Daniel; Holmes, Russell J.; Tram, Allan, Method for the removal of airborne molecular contaminants using oxygen and/or water gas mixtures.
  42. Flitsch, Frederick A., Method of forming a cleanspace fabricator.
  43. Flitsch, Frederick A., Methods and apparatus for vertically orienting substrate processing tools in a clean space.
  44. Flitsch, Frederick A., Methods and apparatus for vertically orienting substrate processing tools in a clean space.
  45. van den Boom, Dirk Johannes; Ehrich, Mathias, Methods and compositions for phenotype identification based on nucleic acid methylation.
  46. Braun,Andreas; Van Den Boom,Dirk; Jurinke,Christian, Methods for detecting methylated nucleotides.
  47. Braun, Andreas; Koster, Hubert; Van den Boom, Dirk; Yip, Ping; Rodi, Charles; He, Liyan; Chiu, Norman; Jurinke, Christiane, Methods for generating databases and databases for identifying polymorphic genetic markers.
  48. Braun, Andreas; Köster, Hubert; Van Den Boom, Dirk Johannes; Yip, Ping; Rodi, Charles; He, Liyan; Chiu, Norman; Jurinke, Christian, Methods for generating databases and databases for identifying polymorphic genetic markers.
  49. Köster, Hubert; Braun, Andreas; Van Den Boom, Dirk; Ping, Yip; Rodi, Charlie; He, Liyan; Chiu, Norman; Jurinke, Christian, Methods for generating databases and databases for identifying polymorphic genetic markers.
  50. Braun, Andreas, Polymorphic kinase anchor proteins and nucleic acids encoding the same.
  51. Habasaki Toshimi (Yokohama JPX) Takata Koji (Yokohama JPX) Uchino Fumitaka (Yokohama JPX) Amemiya Koji (Yokohama JPX) Takahashi Yuji (Yokohama JPX), Process for producing a glass preform for an optical fiber and apparatus for the same.
  52. Lenz, Eric H., Reduction of particle contamination produced by moving mechanisms in a process tool.
  53. Yoshitake Shusuke,JPX ; Tsukumo Yoshiaki,JPX ; Hirano Ryoichi,JPX ; Tojo Toru,JPX ; Tada Yoshiaki,JPX ; Kanda Makoto,JPX, Sample transferring method and sample transfer supporting apparatus.
  54. Yoshitake Shusuke,JPX ; Tsukumo Yoshiaki,JPX ; Hirano Ryoichi,JPX ; Tojo Toru,JPX ; Tada Yoshiaki,JPX ; Kanda Makoto,JPX, Sample transferring method and sample transfer supporting apparatus.
  55. Kinkead Devon A. ; Joffe Michael A., Storing substrates between process steps within a processing facility.
  56. Lenz, Eric H., Substrate load and unload mechanisms for high throughput.
  57. Opalsky, David; Yip, Ping; Bhakta, Kishorchandra, Systems and methods for testing a biological sample.
  58. Kurita, Shinichi; Beer, Emanuel; Nguyen, Hung T.; Blonigan, Wendell T., Transfer chamber for vacuum processing system.
  59. Lee Ban-Yaw,TWX ; Chen Chen-Chin,TWX ; Hsu Yue Tsang,TWX ; Huang Reuy-Huang,TWX ; Huang Kun-Chih,TWX, Use of a sensor to control the fan filter unit of a standard mechanical inter face.
  60. Cantor, Charles R.; Siddiqi, Fouad A., Use of nucleotide analogs in the analysis of oligonucleotide mixtures and in highly multiplexed nucleic acid sequencing.
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