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A mechanical probe for optical measurement of electrical signals. The probe for optical measurement of electrical signals with high chronological resolution is composed of a cuboid electro-optical crystal, of a co-planar waveguide structure located on a lateral face of the crystal and of a metallic

A mechanical probe for optical measurement of electrical signals. The probe for optical measurement of electrical signals with high chronological resolution is composed of a cuboid electro-optical crystal, of a co-planar waveguide structure located on a lateral face of the crystal and of a metallic tip applied to the end face of the crystal adjacent a measuring location. The signal at the measuring location, for example at an interconnect of an integrated circuit is taken with the metallic tip and is fed into the co-planar waveguide structure composed of two strip-shaped metallizations. Probe holders or electrostrictive manipulators known in the art of electrical metrology (probe measuring location) can be used for exact positioning of the probe onto the measuring location.

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A mechanical probe for optical measurement of electrical signals having an electro-optical crystal penetrated by electro-magnetic radiation, comprising: a measuring tip located on an end of the crystal; and a waveguide structure conductively connected to the measuring tip and located on a face of th

A mechanical probe for optical measurement of electrical signals having an electro-optical crystal penetrated by electro-magnetic radiation, comprising: a measuring tip located on an end of the crystal; and a waveguide structure conductively connected to the measuring tip and located on a face of the crystal which is aligned relative to the radiation such that a component of the speed of light of the electro-magnetic radiation in the electro-optical crystal is approximately identical to the speed of an electrical traveling wave signal in the waveguide structure.