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특허 상세정보

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Chemical refill system

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) B01F-003/04   
미국특허분류(USC) 261/20 ; 137/209 ; 141/1 ; 141/83
출원번호 US-0946828 (1986-12-29)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 63  인용 특허 : 11
초록

A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

대표
청구항
▼

A system for providing chemically reactive vapor from a bubbler to silicon wafer treating furnaces and the like, comprising, in combination: (a) a refill reservoir 102 for containing and dispensing ultrahigh purity highly chemically reactive reagent; (b) at least one bubbler 170 comprising a reagent reservoir, an inlet tube 172 for introducing inert gas into the reservoir below the surface of the reagent to cause said gas to bubble inwardly through the reagent, an outlet tube 174 for carrying inert gas at least partially saturated with reagent vapor from...

이 특허에 인용된 특허 (11)

  1. Assenheimer Robert (Boonton NJ) Pekkarinen Michael O. (Lincolnshire IL). Disposable humidifier assembly. USP1977034011288.
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  3. Takimoto Hiroaki (Yokohama JPX) Miyajiri Tetsuo (Yokohama JPX) Yoshida Kiminobu (Yokohama JPX) Turita Tamio (Yokohama JPX). Gas supplying apparatus. USP1986014563312.
  4. Takimoto Hiroaki (Yokohama JPX) Miyajiri Tetsuo (Yokohama JPX) Turita Tamio (Yokohama JPX) Fujikawa Masanori (Yokohama JPX). Liquid replenishing apparatus. USP1986114622988.
  5. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA). Liquid source material container and method of use for semiconductor device manufacturing. USP1979014134514.
  6. Yamazaki Masahiro (Yokohama JPX) Iizuka Shigeru (Yokohama JPX) Kamiya Shigemitsu (Kawasaki JPX) Oka Yoshiro (Yokohama JPX) Fujino Katsuhiro (Yokohama JPX). Method and apparatus for feeding drug liquid from hermetic returnable can. USP1987064676404.
  7. Schumacher John C. (Oceanside CA) Lagendijk Andre (Oceanside CA). Method of shipping and using semiconductor liquid source materials. USP1981114298037.
  8. Lynch Brian (Norcross GA) Narasimham Pundi L. (Norcross GA) Partus Fred P. (Marietta GA). Methods of and apparatus for vapor delivery control in optical preform manufacture. USP1986044582480.
  9. Miyajiri, Tetsuo; Habasaki, Toshimi; Yokota, Hiroshi; Tsurita, Tamio; Nakahara, Motohiro. Raw material supply device. USP1985104545801.
  10. Partus Fred P. (Cobbs County GA). Vapor delivery control system and method. USP1981064276243.
  11. Partus Fred P. (Cobb County GA). Vapor delivery system and method of maintaining a constant level of liquid therein. USP1980114235829.

이 특허를 인용한 특허 피인용횟수: 63

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  2. Fair David L. (Rockford IL). Bubbler container automatic refill system. USP1990124979545.
  3. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J.. Bubbler for substrate processing. USP2008057370848.
  4. Stamp,Michael R.; AmRhein,Frederick J.; Dale,Arnold J.; Pottebaum,Joseph C.; Ebert,Brian J.. Bubbler for substrate processing. USP2006077077388.
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