초록

A system for automatically filling a bubbler, or other vapor delivery system from a reservoir, is disclosed in which the conduit system is purged and pressurized with inert gas, using a unique refill reservoir, level sensing and valving system.

대표청구항 ▼

A system for providing chemically reactive vapor from a bubbler to silicon wafer treating furnaces and the like, comprising, in combination: (a) a refill reservoir 102 for containing and dispensing ultrahigh purity highly chemically reactive reagent; (b) at least one bubbler 170 comprising a reagent

A system for providing chemically reactive vapor from a bubbler to silicon wafer treating furnaces and the like, comprising, in combination: (a) a refill reservoir 102 for containing and dispensing ultrahigh purity highly chemically reactive reagent; (b) at least one bubbler 170 comprising a reagent reservoir, an inlet tube 172 for introducing inert gas into the reservoir below the surface of the reagent to cause said gas to bubble inwardly through the reagent, an outlet tube 174 for carrying inert gas at least partially saturated with reagent vapor from the bubbler; (c) means 104-108, 120-168) including a conduit system for periodically (i) transferring reagent from the refill reservoir through the conduit system into the bubbler and (ii) flushing reagent out of the conduit system and filling the conduit system with inert gas, substantial portions of the conduit system being formed of material which is inert to the reagent conducted therethrough, but permeable to moisture vapor or oxygen or both; enclosure means substantially enclosing the reservoir and the conduit system, said enclosure means being formed of material which is reactive with the reagent but impermeable to moisture vapor and oxygen; and means for maintaining an inert atmosphere in said enclosure.