초록 ▼

A device comprising a flat susceptor rotating parallel to a reference surface about a rotary shaft perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means ar

A device comprising a flat susceptor rotating parallel to a reference surface about a rotary shaft perpendicular to this surface and comprising means for obtaining the stability of the susceptor held in sustentation and means for obtaining its rotary movement, is characterized in that these means are constituted by the structure of the susceptor, of the rotary shaft and of the reference surface, which cooperate with each other under the action of one or several flow of gas.

대표청구항 ▼

A device comprising a reference surface having a plurality of non-aligned orifices, said plurality being greater than 2, a flat susceptor disk rotating parallel to said reference surface, said disk being supported from said reference surface by at least one flow of gas from said orifices, said orifi

A device comprising a reference surface having a plurality of non-aligned orifices, said plurality being greater than 2, a flat susceptor disk rotating parallel to said reference surface, said disk being supported from said reference surface by at least one flow of gas from said orifices, said orifices in said reference surface being within the periphery of said disk, and a rotary shaft perpendicular to said reference surface, said rotary shaft being cylindrical with a small diameter relative to a diameter of said disk, and said rotary shaft being disposed between said reference surface and said disk at the center of symmetry of said disk, wherein said disk is maintained at a separation distance h greater than zero from said reference surface by said flow of gas, and wherein said orifices are separated from one another by a rotation of 2p