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A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the first electro-optic material which is caused by the voltage in the object, is detecte

A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of the first electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the first electro-optic material. In order to compensating for a polarization change caused by the spontaneous birefringence, the first and second electro-optic materials made of the same material are disposed in such a manner that the first and second electro-optic materials and aligned along a light-traveling direction with their lengths in the light-traveling direction being substantially identical and with their optic axes being perpendicular to each other.

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CM,1. A voltage detector for detecting a voltage developing in a selected area of an object to be measured, comprising: a light source for emitting a light beam; a voltage-sensing part including a reflection means for reflecting an input light beam, a first electro-optic material whose refractive in

CM,1. A voltage detector for detecting a voltage developing in a selected area of an object to be measured, comprising: a light source for emitting a light beam; a voltage-sensing part including a reflection means for reflecting an input light beam, a first electro-optic material whose refractive index changes according to said voltage developing in said selected area of said object, and a second electro-optic material whose refractive index is not affected by said voltage of said object, wherein said first and second electro-optic materials are made of the same material, and are disposed in such a manner that said first and second electro-optic materials are aligned along a light-traveling direction with their lengths in said light-traveling direction being substantially identical; splitting and extracting means for extracting a light beam with a first predetermined polarized component from a light beam introduced from said light source which is launched into said second electro-optic material as said input light beam, and extracting an output light beam with a second predetermined polarized component from an output light beam emerging from said second electro-optic material after reflecting from said reflection means; and detection means for determining said voltage developing in said selected area of said object on the basis of intensity of said output light beam with said second predetermined polarized component.