$\require{mediawiki-texvc}$
  • 검색어에 아래의 연산자를 사용하시면 더 정확한 검색결과를 얻을 수 있습니다.
  • 검색연산자
검색도움말
검색연산자 기능 검색시 예
() 우선순위가 가장 높은 연산자 예1) (나노 (기계 | machine))
공백 두 개의 검색어(식)을 모두 포함하고 있는 문서 검색 예1) (나노 기계)
예2) 나노 장영실
| 두 개의 검색어(식) 중 하나 이상 포함하고 있는 문서 검색 예1) (줄기세포 | 면역)
예2) 줄기세포 | 장영실
! NOT 이후에 있는 검색어가 포함된 문서는 제외 예1) (황금 !백금)
예2) !image
* 검색어의 *란에 0개 이상의 임의의 문자가 포함된 문서 검색 예) semi*
"" 따옴표 내의 구문과 완전히 일치하는 문서만 검색 예) "Transform and Quantization"

통합검색

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

특허 상세정보

Fluidized bed process

특허상세정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) C01B-033/02    B05D-007/00    C23C-016/00   
미국특허분류(USC) 427/213 ; 118/716 ; 118/DIG ; 5 ; 423/349
출원번호 US-0165187 (1988-03-07)
발명자 / 주소
출원인 / 주소
인용정보 피인용 횟수 : 27  인용 특허 : 7
초록

Undesirable conversion of a silicon source, such as silane, in the freeboard above a fluidized bed of silicon particles in a fluidized bed reactor, can be reduced by cooling the gas within the freeboard. Preferably, the reduction in temperature is achieved by introducing into the freeboard, a stream of relatively cool quench gas such as hydrogen, which also reduces the concentration of silane in the freeboard. As a result of these two factors, the invention improves the service factor of the fluidized bed apparatus, and reduces the amount of silane conve...

대표
청구항

A fluidized bed process for the preparation of polysilicon, said process comprising (i) fluidizing a bed of silicon particles, within a reactor having a bed zone for said particles and a freeboard above said bed zone, with a motive stream of deposition gas comprising a silicon source, said bed zone being at a temperature above the thermal decomposition temperature of said silicon source, whereby a portion of said silicon source is decomposed in said bed zone to deposit silicon metal on said bed of silicon particles, and a remaining portion of said silico...

이 특허를 인용한 특허 피인용횟수: 27

  1. Yin, Qinghua; Qi, Xiwang; Biberger, Maximilian A.. Catalyst design for heavy-duty diesel combustion engines. USP2018049950316.
  2. Weidhaus, Dieter; Crössmann, Ivo; Schreieder, Franz. Dust-free and pore-free, high-purity granulated polysilicon. USP2010057708828.
  3. Layman, Frederick P.. Fluid recirculation system for use in vapor phase particle production system. USP2017089719727.
  4. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Fluidized bed reactor systems. USP2014128906313.
  5. Erk, Henry F.. Fluidized bed reactor systems and distributors for use in same. USP2014098828324.
  6. Miller, Matthew J.; Spangler, Michael V.; Zeininger, Gerald A.; Onstot, William J.; Stupin, Walter J.. Joint design for segmented silicon carbide liner in a fluidized bed reactor. USP2016099446367.
  7. Miller, Matthew J.; Spangler, Michael V.. Method and apparatus to reduce contamination of particles in a fluidized bed reactor. USP2015129212421.
  8. Biberger, Maximilian A.; Lehman, Jr., Stephen Edward; Kevwitch, Robert Matthew; Yin, Qinghua; Kingsley, Jesudos J.. Method and system for forming plug and play metal catalysts. USP2017089737878.
  9. Kajimoto Tsutomu (Amagasaki JPX) Horie Daizou (Amagasaki JPX) Sakurada Shin-ichi (Amagasaki JPX). Method for growing silicon single crystal. USP1991085037503.
  10. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Methods for introducing a first gas and a second gas into a reaction chamber. USP2014058728574.
  11. Kulkarni, Milind S.; Gupta, Puneet; Devulapalli, Balaji; Ibrahim, Jameel; Revankar, Vithal; Foli, Kwasi. Methods for producing polycrystalline silicon that reduce the deposition of silicon on reactor walls. USP2013038404206.
  12. Yilmaz, Sefa; Miller, Matthew J.; Spangler, Michael V.; Wemp, Barry; Julsrud, Stein. Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor. USP2017059662628.
  13. Miller, Matthew; Spangler, Michael V.; Wemp, Barry; Osborne, E. Wayne. Probe assembly for a fluid bed reactor. USP2017039587993.
  14. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue. Production of polycrystalline silicon by the thermal decomposition of dichlorosilane in a fluidized bed reactor. USP2015109156705.
  15. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor. USP2015089114996.
  16. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue. Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor. USP2015089114997.
  17. Gupta, Puneet; Huang, Yue; Bhusarapu, Satish. Production of polycrystalline silicon in substantially closed-loop processes that involve disproportionation operations. USP2015028956584.
  18. Bhusarapu, Satish; Huang, Yue; Gupta, Puneet. Production of polycrystalline silicon in substantially closed-loop systems. USP2013058449848.
  19. Bhusarapu, Satish; Huang, Yue; Gupta, Puneet. Production of polycrystalline silicon in substantially closed-loop systems. USP2016079394180.
  20. Gupta, Puneet; Huang, Yue; Bhusarapu, Satish. Production of polycrystalline silicon in substantially closed-loop systems that involve disproportionation operations. USP2014058715597.
  21. Chu, Xi. Reactor and method for producing high-purity granular silicon. USP2013098535614.
  22. Braaten, Orvar; Braaten, legal representative, Gunnar; Kjekshus, Arne; Wessel-Berg, Tore. Reverse piezoelectric method for production of silane. USP2011098021522.
  23. Osborne, E. Wayne; Miller, Matthew J.; Spangler, Michael V.; Zeininger, Gerald A.; Onstot, William J.; Stupin, Walter J.. Segmented silicon carbide liner. USP2016019238211.
  24. Lord Stephen M. ; Milligan Robert J.. Silicon deposition reactor apparatus. USP1998095810934.
  25. Scoyer, Jean; Put, Stijn; Nelis, Daniël; Driesen, Kris. Submicron sized silicon powder with low oxygen content. USP20190110181600.
  26. Yun, Seok-Min; Park, Seong-Su; Kim, Se-Myung; Choi, Won-Jin; Yoon, Woo-Jin. Systems and methods for reducing dust in granular material. USP2014098833564.
  27. Bucci, John V.; Cocco, Raymond Anthony; Dehtiar, Max E.; Harder, Patrick J.; Karri, S. B. Reddy; Knowlton, Ted M.; Molnar, Michael J.. Tapered fluidized bed reactor and process for its use. USP20181010105669.