초록

The cylinder cabinet piping system of this invention has a system to supply a purge gas continuously to the main line, or to the main line and the branch line, thereby to prevent stagnation of gas in the purge gas line and to supply a super-high-purity gas to a process unit.

대표청구항 ▼

A cylinder cabinet piping system comprising: a process gas cylinder connected to at least one cylinder valve, a process system and at least one process gas supply line for supplying process gas from said at least one cylinder valve to said process system, a purge gas line and a main line, said main

A cylinder cabinet piping system comprising: a process gas cylinder connected to at least one cylinder valve, a process system and at least one process gas supply line for supplying process gas from said at least one cylinder valve to said process system, a purge gas line and a main line, said main line for continuously passing purge gas supplied from said purge gas line both during the time process gas is supplied to said process system and during the time that purge gas is passed through said cylinder cabinet piping system for purging said system; and at least one branch line connecting said main line to said at least one process gas supply line, a valve connected in said at least one branch line, whereby purging gas is continuously supplied through said main line to prevent stagnation and contamination of purge gas in the purge gas line.