초록 ▼

A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an orientation normal to a carrier axis. The monitoring device may advantageously be used in an apparatus for handl

A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an orientation normal to a carrier axis. The monitoring device may advantageously be used in an apparatus for handling wafer-like objects in a self-contained environment. The monitoring device includes a first detector capable of detecting movement of a body past the detector and generating a corresponding first signal. A translation member is physically coupled to the carrier, such that movement of the translation member results in movement of the carrier. The translation member is moved such that the carrier, and any objects such as wafers supported in the carrier, move along the carrier axis past the first detector. As the translation member moves, a position signal is generated, such that the position signal encodes the position of the translation member. The first detection signal and the position signal are processed to determine the presence or absence of an object on each shelf, and the position of each object. A second detector may be employed to determine whether each object is fully seated in its shelf.

대표청구항 ▼

A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an orientation normal to a carrier axis, the device comprising: a first detector including means for detecting the

A monitoring device for determining the presence or absence of wafer-like objects in a carrier having a plurality of shelves, each shelf being constructed to support one such object in an orientation normal to a carrier axis, the device comprising: a first detector including means for detecting the presence of a body moving with the carrier along the carrier axis transversely past the first detector and means for generating a first detection signal corresponding to the detection of the presence of said body; a translation member physically coupled to said carrier such that movement of the translation member results in movement of the carrier; an object handler including means for removing objects from the shelves; movement means for moving the translation member such that the carrier and any objects supported on the carrier move along the carrier axis past the first detector; means for generating a position signal during motion of the translation member such that the position signal encodes the position of the translation member; and, processing means for processing the first detection signal and the position signal to determine the presence or absence of an object on each shelf and to enable proper handling of the objects by indexing the object handler so that it does not attempt removal of objects from shelves on which an object is absent.