초록 ▼

The apparatus is provided with a main chamber divided into two chamber halves by a rotatable index plate. The plate rotates through a load lock station, through which wafer-like articles are inserted into and removed from the main chamber, and a series of processing stations, at each of which a proc

The apparatus is provided with a main chamber divided into two chamber halves by a rotatable index plate. The plate rotates through a load lock station, through which wafer-like articles are inserted into and removed from the main chamber, and a series of processing stations, at each of which a process such as etching or sputter coating can be performed simultaneously upon different objects and sequentially upon the same objects. Each processing chamber is isolatable from the main chamber and other processing chambers during processing so that different substrates can be processed simultaneously at the various stations using different processes without cross contamination. Substrate holders resiliently mounted on the plate move transversely when compressed between a cup shaped back-plane device and the main chamber wall to separately seal each of the processing chambers from the main chamber.

대표청구항 ▼

Apparatus for transporting a wafer-like article and subjecting the article to at least one process step comprising: means defining a first chamber maintained substantially continuously at a vacuum or pressure level; aperture means in said first chamber through which an article to be subjected to the

Apparatus for transporting a wafer-like article and subjecting the article to at least one process step comprising: means defining a first chamber maintained substantially continuously at a vacuum or pressure level; aperture means in said first chamber through which an article to be subjected to the process step can be introduced into the first chamber; means in said first chamber for receiving and holding the article; a second chamber in which a process step can be performed on the article, said second chamber being in communication with said first chamber; means for moving the article held by said receiving and holding means substantially in a plane of movement to a position in the first chamber adjacent where the process step is to be performed on the article; movable means for isolating the second chamber from communication with said first chamber while said process step is performed on the article and for thereafter opening said second chamber to the first chamber so that the second chamber is in communication with the first chamber after the article has been subjected to the process step, said receiving and holding means remaining in contact with the article during the performance of the process step; and article transfer means for removing the article from said first chamber after the article has been subjected to the process step; and wherein said moving means comprises rotatable plate means disposed for movement in said plane of movement; and wherein said receiving and holding means comprises: first means coupled to said plate means and defining an inner open area; first resilient means coupling said plate means and first means; second means disposed in said inner open area and coupled to said first means, said second means defining a further area contained within said inner open area for receiving the article; and second resilient means coupling said second means to said first means.