초록 ▼

A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loadi

A wafer processing system includes an autoloader mounted within a load lock for providing batch, cassette-to-cassette automatic wafer transfer between the semiconductor processing chamber and cassette load and unload positions within the load lock. The system provides rapid, contamination-free loading and unloading of semiconductor wafers.

대표청구항 ▼

A system for fabricating workpieces such as semiconductor wafers, comprising a robotic handling system for transferring wafers bidirectionally between first and second vertically spaced positions and first and second angular orientations associated with the respective positions, comprising: wafer gr

A system for fabricating workpieces such as semiconductor wafers, comprising a robotic handling system for transferring wafers bidirectionally between first and second vertically spaced positions and first and second angular orientations associated with the respective positions, comprising: wafer gripper means including a wafer gripper and a housing having at least one retractable arm extending therefrom mounting the wafer gripper; elevator means mounting the housing and vertically moving the housing between the first and second positions; means mounted on the elevator means for pivoting the housing and wafer gripper between the first and second angular orientations to orient the wafer gripper for loading and unloading wafers at each of the first and second positions; and means for extending and retracting the retractable arm to position the wafer gripper for picking up and releasing wafers at the first and second positions, and wherein the first position is a wafer support position associated with wafer processing apparatus within a wafer processing vacuum chamber, and the second position is a substantially horizontally oriented wafer support position within a vacuum load lock chamber which also has therein third and fourth positions spaced horizontally from the second position, for loading and unloading wafers, the system further comprising indexing means adapted for supporting at least a pair of wafer holding cassettes located at least one each at the third and fourth positions and for selectively indexing the cassettes vertically through their associated positions; and a wafer transfer blade means comprising a blade having first and second flat wafer-holding end sections and being mounted for reciprocal horizontal pivoting to move said end sections between the second position and the third and fourth positions to locate the first blade end section at the second position for wafer transfer by wafer gripper means when the second end section is at one of the third or fourth positions and to locate the second blade end section at the second position when the first end section is at the other of the third and fourth positions; and wherein said selective cassette indexing movement through the associated third or fourth position effects wafer transfer between the cassette and the transfer blade.