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A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of an electro-optic material which is caused by the voltage in the object, is detected as a

A voltage detector detects a voltage developing in a selected area of an object such as an integrated circuit by utilizing an electro-optic material equipped in an optical probe. A change in refractive index of an electro-optic material which is caused by the voltage in the object, is detected as a change of polarization of a light beam passing through the electro-optic material. In order to avoid undesired changes of polarization of the light beam when passing through optical fibers, a polarizer, beam splitters, and an analyzer are assembled together and connected to the electro-optic material to form a compact optical probe.

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A voltage detector for detecting a voltage developing in a selected area of an object to be measured, comprising: a pulse light source for emitting a pulse light beam; first guide means for guiding said light beam from said pulse light source; a voltage-sensing part including an electro-optic materi

A voltage detector for detecting a voltage developing in a selected area of an object to be measured, comprising: a pulse light source for emitting a pulse light beam; first guide means for guiding said light beam from said pulse light source; a voltage-sensing part including an electro-optic material whose refractive index changes according to said voltage developing in said selected area of said object; splitting and extracting means for extracting a light beam with a first predetermined polarized component from said light beam guided from said first guide means, splitting said light beam with said first predetermined polarized component into a reference light beam and an input light beam which is launched into said electro-optic material, splitting an output light beam emerging from said electro-optic material, and extracting an output light beam with a second predetermined polarized component from one of the split output light beams; second guide means for guiding said reference light beam and said output light beam with said second predetermined polarized component; and detection means for determining said voltage developing in said selected area of said object, said detecting means including a first photoelectric converter for detecting intensity of said reference light beam guided from said second guide means and a second photoelectric converter for detecting said output light beam with said predetermined polarized component guided from said second guide means.