초록 ▼

An automated cassette handler transports a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the w

An automated cassette handler transports a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

대표청구항 ▼

An automated cassette handler for transporting integrated circuit wafers held in a wafer cassette within a canopy, said canopy coupled to a piece of integrated circuit processing equipment, said handler comprising: a swinger housing within the canopy; at least two parallel rotation arms coupled betw

An automated cassette handler for transporting integrated circuit wafers held in a wafer cassette within a canopy, said canopy coupled to a piece of integrated circuit processing equipment, said handler comprising: a swinger housing within the canopy; at least two parallel rotation arms coupled between the canopy and the swinger housing so that the swinger housing can be rotationally moved along an arc within the canopy while maintaining the swinger housing in a substantially constant plane with respect to the canopy; driver means coupled by a shaft to the rotation arms for rotating the swinger housing; gripper means coupled to the swinger housing for grasping and holding the cassette while the swinger housing is rotated to lift and transport the cassette; depressor means coupled to the swinger housing for pushing and retaining the wafers within the cassette while the cassette is lifted and transported; first sensor means coupled to the gripper means for sensing whether the cassette has been gripped by the gripper means; second sensor means coupled to the depressor means for sensing the position of the depressor means; and third sensor means coupled to at least one of the rotation arms for sensing the position of the swinger housing.