초록 ▼

Electro-optic probes which are adapted to be placed in the fringe field from electrical signals propagating on conductors (which may be conductors of an integrated circuit) and which modulate optical pulses passing therethrough, for example by modulating the polarization of the light in accordance w

Electro-optic probes which are adapted to be placed in the fringe field from electrical signals propagating on conductors (which may be conductors of an integrated circuit) and which modulate optical pulses passing therethrough, for example by modulating the polarization of the light in accordance with the Pockels effect, utilize thin bodies of electro-optic material, such as a single crystal of GaAs in a manner to reduce physical damage to the probe and to the circuit and to precisely locate the probe in the field of the signal being measured, such as adjacent to the conductor of interest. The electro-optic material that is used may also be implanted with high energy ions of low Z materials (e.g. hydrogen or oxygen) so as to create charge trapping sites and to reduce the photo conductivity of the semiconductive electro-optic material sufficiently that the dielectric relaxation time (where photo current through the material reduces by 1/e) is less than the duration of the optical pulses without eliminating the electro-optic (e.g. Pockels) effect.

대표청구항 ▼

In a system for electro-optically measuring an electrical signal which produces a field with an electro-optic element through which said field passes and through which an optical signal also passes and is modulated by said field, said measurement being in accordance with the modulation of said optic

In a system for electro-optically measuring an electrical signal which produces a field with an electro-optic element through which said field passes and through which an optical signal also passes and is modulated by said field, said measurement being in accordance with the modulation of said optical signal, an improved probe which comprises a support having a surface with an edge, a strip of flexural material mounted on said surface and extending beyond said edge as a cantilever, said cantilever having a free end, said electro-optical element being mounted on said element between said edge and said free end and extending beyond said free end to a region where said optical signal intersects said element whereby said element is flexurally supported.