$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Manufacture of a quartz glass vessel for the growth of single crystal semiconductor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03B-019/04
출원번호 US-0278591 (1988-12-01)
우선권정보 JP-0304624 (1987-12-03); JP-0304625 (1987-12-03); JP-0304626 (1987-12-03)
발명자 / 주소
  • Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX)
출원인 / 주소
  • Shin-Etsu Handotai Company, Limited (Tokyo JPX 03) Shin-Etsu Quartz Products Co., Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 45  인용 특허 : 4

초록

A quartz glass crucible adapted for use in a process for pulling a single crystal semiconductor material having an opaque outer substrate of a quartz glass with a relatively high bubble content and an inner transparent glass layer which is substantially free from bubbles. The crucible is produced wh

대표청구항

Method for producing quartz crucible comprising steps of providing a crucible substrate made of silicon dioxide having a high bubble content, rotating said substrate in a condition disposed in mould means and forming a high temperature gas atmosphere in said substrate, supplying powders of silicon d

이 특허에 인용된 특허 (4)

  1. Albrecht Horst (Hanau DEX), Crucible for semiconductor manufacturing purposes and a process for manufacturing the crucible.
  2. Rss Dieter (Hsbach-Feldkahl DEX) Bonewitz Hans-Ulrich (Hammersbach DEX) Christiansen Uwe (Gelnhausen DEX) Klein Karl-Friedrich (Bruchkbel DEX) Mhlich Albert (Frankfurt DEX) Rau Karlheinz (Hanau DEX) , Method for the continuous building of a hollow cylindrical soot body having no internal support.
  3. Brning Rolf (Bruchkbel DEX) Habegger Friedhelm (Hammersbach DEX), Method of making quartz glass crucibles, and apparatus carrying out the method.
  4. Brown David R. (Beverly MA) Frost ; Jr. Charles E. (Exeter NH) White Kenneth A. (Raymond NH), Method of manufacturing quartz glass crucibles with low bubble content.

이 특허를 인용한 특허 (45)

  1. Sudo, Toshiaki; Suzuki, Eriko; Kishi, Hiroshi; Fujita, Takeshi, Apparatus and method for manufacturing vitreous silica crucible.
  2. Hansen, Richard L.; D'Orazio, Fred; Lou, Victor; Coleman, George, Apparatus for silica crucible manufacture.
  3. Holder John Davis, Crucible and method of preparation thereof.
  4. Phillips, Richard J.; Basak, Soubir; Samanta, Gaurab, Crystal growing systems and methods including a transparent crucible.
  5. Richard Joseph Phillips ; Larry E. Drafall ; Kirk D. McCallum, Crystal puller and method for growing monocrystalline silicon ingots.
  6. Schermerhorn Paul M., Furnace for producing fused silica glass.
  7. Kishi, Hiroshi; Kanda, Minoru; Morikawa, Masaki, Method and apparatus for manufacturing vitreous silica crucible.
  8. Sudo, Toshiaki; Kishi, Hiroshi; Hasebe, Kouta, Method and apparatus for manufacturing vitreous silica crucible.
  9. Sudo, Toshiaki; Kishi, Hiroshi; Hasebe, Kouta, Method and apparatus for manufacturing vitreous silica crucible.
  10. Maxon John E. (Canton NY), Method and containment vessel for producing fused silica glass and the fused silica blank produced.
  11. Akiho, Kazuhiro; Kusuhara, Masaki; Watanabe, Hiroyuki; Uno, Tomoyasu, Method for manufacturing quartz glass crucible.
  12. Ikeda Tooru ; Asajima Kazuo,JPX ; Kimura Hiroshi,JPX ; Watanabe Hiroyuki,JPX, Method for producing a quartz glass crucible.
  13. Ohama, Yasuo; Mizuno, Shigeo, Method for producing quartz glass crucible.
  14. Hansen, Richard L.; Ahlgren, Frederic F.; Giddings, Robert A., Method for quartz crucible fabrication.
  15. Kemmochi, Katsuhiko; Kayser, Thomas; Coolich, Robert Joseph; Lehmann, Walter, Method of making a silica crucible in a controlled atmosphere.
  16. Inaki Kyoichi,JPX ; Segawa Tohru,JPX ; Yoshida Nobumasa,JPX ; Endo Mamoru,JPX, Method of producing cristobalite containing silica glass.
  17. Christman Marc A. ; Mosier Robert O., Methods and apparatus for minimizing white point defects in quartz glass crucibles.
  18. Hansen Richard L. ; Drafall Larry E. ; McCutchan Robert M. ; Holder John D. ; Allen Leon A. ; Shelley Robert D., Methods for improving zero dislocation yield of single crystals.
  19. Kemmochi, Katsuhiko; Togawa, Takayuki; Mosier, Robert; Spencer, Paul, Methods for making silica crucibles.
  20. Yamagata, Shigeru; Usui, Tomomi, Powdered silica, silica container, and method for producing them.
  21. Alleppey V. Hariharan ; Mohan Chandra ; Michael Costantini ; Yuepeng Wan, Protective layer for quartz crucibles used for silicon crystallization.
  22. Sato Tatsuhiro,JPX ; Mizuno Shigeo,JPX ; Matsumura Mitsuo,JPX ; Watanabe Hiroyuki,JPX, Quart crucible with large diameter for pulling single crystal and method of producing the same.
  23. Sato Tatsuhiro,JPX ; Mizuno Shigeo,JPX ; Matsumura Mitsuo,JPX ; Watanabe Hiroyuki,JPX, Quartz crucible with large diameter for pulling single crystal and method of producing the same.
  24. Hansen, Richard Lee; Kircher, Theodore P.; Devanathan, Narsi, Quartz glass crucible and method for treating surface of quartz glass crucible.
  25. Watanabe Hiroyuki,JPX ; Sato Tatsuhiro,JPX, Quartz glass crucible for producing silicone single crystal and method for producing the crucible.
  26. Dawes, Steven Bruce; Jennings, Douglas H, Refractory vessels and methods for forming same.
  27. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  28. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  29. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  30. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  31. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  32. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  33. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  34. Yamagata, Shigeru; Usui, Tomomi, Silica container and method for producing the same.
  35. Kemmochi, Katsuhiko; Mosier, Robert; Spencer, Paul, Silica crucible with inner layer crystallizer and method.
  36. Kemmochi, Katsuhiko; Coolich, Robert Joseph, Silica crucible with pure and bubble free inner crucible layer and method of making the same.
  37. Kemmochi,Katsuhiko; Mosier,Robert O.; Spencer,Paul G., Silica glass crucible.
  38. Kemmochi,Katsuhiko; Ohama,Yasuo, Silica glass crucible with barium-doped inner wall.
  39. Kemmochi,Katsuhiko; Mosier,Robert; Ohama,Yasuo, Silica glass crucible with bubble-free and reduced bubble growth wall.
  40. Yamagata, Shigeru, Single crystal silicon pulling silica container and manufacturing method thereof.
  41. Yamagata, Shigeru, Single-crystal silicon pulling silica container and method for producing the same.
  42. Hansen Richard L. ; Drafall Larry E. ; McCutchan Robert M. ; Holder John D. ; Allen Leon A. ; Shelley Robert D., Surface-treated crucibles for improved zero dislocation performance.
  43. Bronson Timothy C. ; Rudolph Bruce G., System and method for detecting phase errors in asics with multiple clock frequencies.
  44. Kodama, Makiko; Kishi, Hiroshi; Kanda, Minoru, Vitreous silica crucible for pulling silicon single crystal.
  45. Kishi, Hiroshi, Vitreous silica crucible for pulling single-crystal silicon and method of manufacturing the same.
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로