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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0152379 (1988-02-04) |
발명자 / 주소 |
|
인용정보 | 피인용 횟수 : 148 인용 특허 : 7 |
A silicon micropump which can be manufactured by established integrated circuit techniques, and which is provided with piezoelectric valves, is described. The micropump can be used to pump liquids or gases at a very low rate, which can be accurately prescribed. The body of the pump and the valves ar
A pump for the displacement of a liquid, comprising: a body of a silicon wafer, said wafer having a front side and a back side, said front side having an original front surface plane and said back side having an original back surface plane, while in said front side are shaped by a first means for re
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