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Wafer carrier 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • A47G-019/08
출원번호 US-0188312 (1988-04-29)
발명자 / 주소
  • Kos Robert D. (Victoria MN)
출원인 / 주소
  • Fluoroware, Inc. (Chaska MN 02)
인용정보 피인용 횟수 : 31  인용 특허 : 26

초록

A moldable plastic, distortion and warp resistant wafer carrier having an open top for insertion and removal of wafers with opposed upright end walls. Side walls with inner opposed ribs for spacing axially aligned wafers in the carrier are provided wherein one upright end wall is H-shaped with a hor

대표청구항

A moldable plastic, distortion and warp resistant wafer carrier having an open top for insertion and removal of wafers, an open bottom, a pair of opposed upright end walls, and a pair of opposed upright side walls with inner, opposed ribs for spacing axially aligned wafers in the carrier, one said u

이 특허에 인용된 특허 (26)

  1. Lasch ; Jr. Cecil A. (21230 Homestead Road Cupertino CA 95014) Sipos Laszlo (18883 Allendale Ave. Saratoga CA 95070) Ursprung Karl (3655 Pruneridge Ave. Santa Clara CA 95051), Automatic wafer feeding and pre-alignment apparatus and method.
  2. Lee Steven N. (Irvine CA), Boat for wafer processing.
  3. Schulte Harvey L. (Los Altos CA), Carrier for semiconductive wafers.
  4. Shead ; Terence H. C., Collapsible container.
  5. Lee Steven N. (Irvine CA), Contiguous wafer boat.
  6. Mayer Karl (Hagenburger Strasse 26 Radolfzell DEX) Luther Erich (Hagenburger Strasse 26 Wunstorf DEX) Maelzer Martin (Hagenburger Strasse 26 Wunstorf DEX), Device for stacking board-staped articles.
  7. Johnson, Douglas M., Disk package.
  8. Lasch ; Jr. Cecil A. (20200 Lucille Drive Cupertino CA 95014), Fluid bearing transfer and heat treating apparatus and method.
  9. Georgopulos Thomas (Clearwater FL), Information panel assembly.
  10. Panicker Ramachandra M. P. (Camarillo CA) Essinger Walter F. (Thousand Oaks CA), Light emission enhancing dielectric layer for EL panel.
  11. Panicker Ramachandra M. P. (Camarillo CA), Light sink layer for a thin-film EL display panel.
  12. Rustomji Sam H. (Camarillo CA), Mask for vacuum depositing back metal electrodes on EL panel.
  13. Johnson Douglas M. (Chanhassen MN), Package.
  14. Johnson, Douglas M., Package.
  15. Blome Eugene R. (San Jose CA), Processing, shipping and/or storage container for photomasks and/or wafers.
  16. Johnson Douglas M. (Carver MN), Reinforced wafer basket.
  17. Butler Robert M. (Tempe AZ), Semiconductor wafer diffusion boat and method.
  18. Johnson Douglas M. (Waconia MN), Shipping container for silicone semiconductor wafers.
  19. Martorano Joseph A. (Sherman Oaks CA) Bell Robert J. (Moorpark CA), Speedometer display of simulated analog needle and odometer on electroluminescent panel.
  20. Watkins, Randy W.; Bell, Robert J.; Martorano, Joseph A.; Essinger, Walter F., System for displaying information with multiple shades of a color on a thin-film EL matrix display panel.
  21. Essinger Walter F. (Thousand Oaks CA), Thin-film EL panel mounting unit.
  22. Wallestad Victor C. (Edina MN), Wafer basket and easily attached and detached carrier for same.
  23. Lee Eui-Wan (Eggertsville NY), Wafer boat.
  24. Milliren Guy L. (Mound MN), Wafer carrier.
  25. Johnson Douglas M. (Waconia MN), Wafer processing cassette.
  26. Mayer Alfred (Somerville NJ), Wettable carrier in gas drying system for wafers.

이 특허를 인용한 특허 (31)

  1. Buitron, Gerardo; Luu, Thuan; Okamoto, Barry, Apparatus for combining or separating disk pairs simultaneously.
  2. Buitron,Gerardo; Luu,Thuan; Okamoto,Barry, Apparatus for combining or separating disk pairs simultaneously.
  3. Crofton,Walter; Newman,David; Ta,Nghia, Automated merge nest for pairs of magnetic storage disks.
  4. Iwamoto, Yoshio; Kurokawa, Hiroyuki, Carrier for cleaning silicon wafers.
  5. den Hartog Besselink, Edwin; Garssen, Adriaan; Dirkmaat, Marco, Cassette holder assembly for a substrate cassette and holding member for use in such assembly.
  6. Anderson Douglas G. (Vancouver WA) Jordan Jason D. (Vancouver WA), Combination wafer carrier and storage device.
  7. Bhatt, Sanjiv M.; Eggum, Shawn D., Composite substrate carrier.
  8. Jeff Mendiola, Electronic device workpiece carriers.
  9. Hill, Eric, Getter plate.
  10. Kim,Kwang Kon; Clasara,Ramon; Peabody,Charles F., Information-storage media with dissimilar outer diameter and/or inner diameter chamfer designs on two sides.
  11. Allen, Joseph, Manufacturing single-sided storage media.
  12. Hachtmann,Bruce, Memory disk shipping container with improved contaminant control.
  13. Fan, Chun Wah, Method and system for thermal processing of objects in chambers.
  14. Buitron,Gerardo; Crofton,Walter; Hachtmann,Bruce; Newman,David, Method for manufacturing single-sided hard memory disks.
  15. Kim,Kwang Kon; Clasara,Ramon, Method for manufacturing single-sided sputtered magnetic recording disks.
  16. Kim, Kwang Kon; Clasara, Ramon, Method for producing single-sided sputtered magnetic recording disks.
  17. Lee, Choong Man; Yoo, Yong Min; Kim, Young Jae; Chun, Seung Ju; Kim, Sun Ja, Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method.
  18. Buitron,Gerardo; Cheng,Peter; Crofton,Walter; Kim,Kwang Kon; Maida,William; Newman,David, Method of lubricating multiple magnetic storage disks in close proximity.
  19. Buitron, Gerardo, Method of merging two disks concentrically without gap between disks.
  20. Buitron,Gerardo; Gapay,Clarence; Grow,John; Hachtmann,Bruce; Kim,Kwang Kon; Nguyen,Huan; O'Hare,Tom, Method of simultaneous two-disk processing of single-sided magnetic recording disks.
  21. Raisanen, Petri; Givens, Michael Eugene, Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures.
  22. Mendiola Jeff, Methods of processing electronic device workpieces and methods of positioning electronic device workpieces within a workpiece carrier.
  23. Jeff Mendiola, Methods of processing semiconductor wafers, methods of supporting a plurality of semiconductor wafers, methods of processing electronic device workpieces and methods of orienting electronic device wo.
  24. Margetis, Joe; Tolle, John; Bartlett, Gregory; Bhargava, Nupur, Process for forming a film on a substrate using multi-port injection assemblies.
  25. Tsai, Yu-Pin; Pao, Chih-Min; Tseng, Ching-Feng; Chu, Fu-Tang, Semiconductor wafer cassette.
  26. Tomanovich John A., Slip free vertical rack design.
  27. Aigo Seiichiro (3-15-13 Negishi ; Daito-ku ; Tokyo JPX), Support frame for supporting a semiconductor wafer carrier.
  28. Simpson, Anthony; Wiseman, Brian, Thin wafer carrier.
  29. Gregerson, Barry; Steffens, Jason; Raschke, Russ V., Thin wafer shipper.
  30. Buitron, Gerardo; Grow, John, W-patterned tools for transporting/handling pairs of disks.
  31. Raschke, Russ V.; Gregerson, Barry; Steffens, Jason Todd, Wafer shipper.
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