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Ultrathin-film gas detector 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-027/12
출원번호 US-0386713 (1989-07-31)
발명자 / 주소
  • Johnson Christy L. (Ann Arbor MI) Schwank Johannes (Ann Arbor MI) Wise Kensall D. (Ann Arbor MI)
출원인 / 주소
  • The Regents of the University of Michigan (Ann Arbor MI 02)
인용정보 피인용 횟수 : 50  인용 특허 : 22

초록 ▼

A device for detecting a gaseous species including (i) a silicon substrate having two major surfaces and comprising a dielectric window region (ii) a heater situated on the dielectric window region on one major surface; and (iii) a conductivity cell electrode thin metal transducing film assembly sit

대표청구항 ▼

A device for detecting a gaseous species, comprising: (i) a substrate having two opposed major surfaces and including a dielectric window region; (ii) heater means situated on said dielectric window region on one of said opposed surfaces; and (iii) a conductivity cell electrode means/thin transducin

이 특허에 인용된 특허 (22)

  1. Takahashi Hideaki (Aichi JPX) Kondo Haruyoshi (Aichi JPX) Takeuchi Takashi (Aichi JPX) Hayakawa Kiyoharu (Aichi JPX), Air-fuel ratio sensor and apparatus using the same.
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  2. Zuckerman Matthew (Carmel CA), Apparatus and method for measuring the concentration of gases.
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  3. Takahama Teizo (Kawasaki JPX) Kazama Toyoki (Kawasaki JPX), Carbon monoxide detecting device.
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  4. Nakatani Yoshihiko (Osaka JPX) Sakai Masayuki (Minamikawachi JPX), Combustible gas detecting element.
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  5. Johnson Robert G. (Minnetonka MN), Composition sensor with minimal non-linear thermal gradients.
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  6. Kaneyasu Masayoshi (Yokohama JPX) Arima Hideo (Yokohama JPX) Ito Mitsuko (Yokosuka JPX) Iwanaga Shoichi (Yokohama JPX) Sato Nobuo (Yokosuka JPX) Noro Takanobu (Yokohama JPX) Ikagami Akira (Yokohama J, Gas detecting apparatus.
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  7. Iwanaga Shoichi (Yokohama JPX) Sato Nobuo (Yokosuka JPX) Ikegami Akira (Yokohama JPX) Isogai Tokio (Fujisawa JPX) Noro Takanobu (Yokohama JPX) Arima Hideo (Yokohama JPX), Gas detection device and method for detecting gas.
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  8. Kimura Mitsuteru (Tagajyo JPX), Gas detector.
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  9. Leary David J. (2832 Eagle Dr. Ft. Collins CO 80526), Gas monitoring apparatus.
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  10. Rigby Leslie J. (Bishops Stortford GB2), Gas sensor.
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  11. Harris Lawrence A. (Schenectady NY), Hydrogen detector.
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  12. Svensson Christer Martinus (Goteborg SW) Lundkvist Leif Sigurd (Angered SW) Lundstrom Kurt Ingemar (Goteborg SW) Shivaraman Madurai Somanathan (Goteborg SW), Hydrogen detector.
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  13. Jones Eric (Chelmsford GBX) Doncaster Alan M. (Maldon GBX), Hydrogen sulphide sensor.
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  14. Bonne Ulrich (Hopkins MN) Johnson Robert G. (Minnetonka MN), Integratable oxygen sensor.
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  15. Takeuchi Takashi (Aichi JPX) Takahashi Hideaki (Aichi JPX) Saji Keiichi (Aichi JPX) Kondo Haruyoshi (Aichi JPX) Hayakawa Kiyoharu (Aichi JPX), Limiting electric current type oxygen sensor with heater and limiting electric current type oxygen concentration detecti.
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  16. Manaka Junji (Kawasaki JPX), Low power gas detector.
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  17. Chang Shih-Chia (Troy MI), Method and thin film semiconductor sensor for detecting NOx.
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  18. Lder Ernst (Stuttgart DEX) Kallfass Traugott (Grossbottwar DEX) Borgwardt Christian (Stuttgart DEX), Moisture sensor with valve metal composition electrodes.
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  19. Leary David J. (2832 Eagle Dr. Fort Collins CO 80526) Barnes James O. (3100 Rockwood Dr. Fort Collins CO 80525), Semiconductor gas sensor.
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  20. Chang Shih-Chia (Troy MI) Hicks David B. (Farmington Hills MI), Semiconductor gas sensor having thermally isolated site.
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  21. Takahashi Hideaki (Aichi JPX) Kondo Haruyoshi (Aichi JPX) Takeuchi Takashi (Aichi JPX) Hayakawa Kiyoharu (Aichi JPX) Muraki Hideaki (Aichi JPX), Thin film oxygen sensor with microheater.
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  22. Treitinger Ludwig (Munich DEX) Tischer Peter (Strasslach DEX) Schneider-Gmelch Brigitte (Munich DEX), Thin film semiconductor gas sensor having an integrated heating element.
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  1. Dimeo, Jr., Frank; Chen, Philip S. H.; Neuner, Jeffrey W.; Welch, James; Stawasz, Michele; Baum, Thomas H.; King, Mackenzie E.; Chen, Ing-Shin; Roeder, Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
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  2. Blumenfeld, Martin; Fisher, Mark; Williamson, Fred; Cibuzar, Gregory T.; Van Ness, Brian G., Apparatus for generating a temperature gradient.
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  3. Blumenfeld, Martin; Fisher, Mark; Williamson, Fred; Cibuzar, Gregory T.; Van Ness, Brian G., Apparatus for generating a temperature gradient and methods for using the gradient to characterize molecular interactions.
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  4. Blumenfeld, Martin; Fisher, Mark; Williamson, Fred; Cibuzar, Gregory T.; Van Ness, Brian G., Apparatus for generating a temperature gradient and methods for using the gradient to characterize molecular interactions.
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  5. Nunez, Anthony I.; Rowland, Harry D., Cardiac pressure monitoring device.
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  6. McFarland, Eric W.; Weinberg, Henry W.; Nienhaus, Hermann; Bergh, Howard S.; Gergen, Brian; Mujumdar, Arunava, Chemical sensor using chemically induced electron-hole production at a schottky barrier.
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  7. Glaunsinger William ; Sorensen Ian ; Bao Qingcheng ; McKelvy Michael J., Chemical switch for detection of chemical components.
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  8. Glaunsinger William ; Sorensen Ian ; Bao Qingcheng ; McKelvy Michael J., Chemical switch for detection of chemical components.
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  9. Pyke Stephen C. (Sisters OR), Detection of fluids with metal-insulator-semiconductor sensors.
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  10. Katzmann Fred L., Electrothermal conversion elements, apparatus and methods for use in comparing, calibrating and measuring electrical sig.
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  11. Brown,Peter S.; Berlo,Marcelyn A.; Ton,Tina A.; Dang,Kim Lien; Creech,Veronica; Parker,Joanne L., Endovascular graft with pressor and attachment methods.
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  12. Hayashi,Reid K.; Concemi,Alfred, Endovascular graft with pressure, temperature, flow and voltage sensors.
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  14. Mills, Michael John; Sandhage, Kenneth Henry; Gouma, Pelagia-Irene, Free-standing fluid sensors, filters, and catalyst devices, and methods involving same.
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  15. Mills, Michael John; Sandhage, Kenneth Henry; Gouma, Pelagia-Irene, Free-standing fluid sensors, filters, and catalyst devices, and methods involving same.
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  16. Williams David Edward,GBX, Gas sensor.
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  17. Lee,Won Bae; Lee,Ho Jun, Gas sensor and fabrication method thereof.
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  18. Farangis, Baker; Meyer, Bruno K.; Jorde, Hans-Peter; Stiebich, Jennifer, Gas sensor for determining hydrogen or hydrogen compounds.
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  19. Stokes Edward Brittain ; Gui John Yupeng, Gas sensor with protective gate, method of forming the sensor, and method of sensing.
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  23. Hung, Andy; Greenberg, Robert; Zhou, Dau Min; Judy, Jack; Talbot, Neil, High density array of micro-machined electrodes for neural stimulation.
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  25. DiBattista Michael ; Patel Sanjay V. ; Gland John L. ; Schwank Johannes W., Hot stage for scanning probe microscope.
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  27. Kusnezoff, Mihails; Ziesche, Steffen; Paepke, Anne, Method for determining diffusion and/or transfer coefficients of a material.
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  28. Bao Qingcheng ; Sorensen Ian ; Glaunsinger William, Method for regeneration of a sensor.
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  29. DiMeo, Jr., Frank; Baum, Thomas H., Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same.
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  30. Moore David Frank,GB2 ; Hoole Andrew Charles Frederick,GB2 ; Heaver Alan,GB2, Micromechanical sensor.
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  31. Liwei Lin ; Yu-Ting Cheng ; Khalil Najafi ; Kensall D. Wise, Microstructures.
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  32. Dariavach, Nader G.; Liang, Jin; French, Francis W.; Callahan, Paul T.; Barr, Gordon O., Multi-channel contaminant measurement system.
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  33. Kudo Shuzo,JPX ; Ohnishi Hisao,JPX ; Ipponmatsu Masamichi,JPX ; Tanaka Shoji,JPX ; Yamauchi Hisao,JPX ; Takano Satoshi,JPX ; Wakata Mitsunobu,JPX, Nitrogen oxide detecting sensor and method of manufacturing the same.
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  34. Rowland, Harry; Nagy, Mike; MacDonald, Kevin; Kurt, Alyssa; Black, Andy; Leopold, Andy, Pressure sensor, anchor, delivery system and method.
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  35. Lin Liwei ; Cheng Yu-Ting ; Najafi Khalil ; Wise Kensall D., Process for making microstructures and microstructures made thereby.
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  36. Lauf Robert J., Resistive hydrogen sensing element.
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  37. Erdler, Gilbert; Reinecke, Holger; Müller, Claas; Frank, Mirko, Resistive hydrogen sensor.
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  38. Dutta, Prabir K.; Adeyemo, Adedunni D., Room temperature CO sensor and method of making same.
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  39. Sundaram, Balamurugan; Nagy, Michael; Nielsen, Douglas; Sundaram, Suresh, Self test device and method for wireless sensor reader.
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  40. Edward B. Stokes ; Steven H. Azzaro ; Thomas G. O'Keeffe, Status detection apparatus and method for fluid-filled electrical equipment.
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  41. Abraham, Margaret H.; Taylor, David P., Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same.
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  42. Taylor, David P.; Abraham, Margaret H., Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same.
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  43. Raisanen, Walfred R., Thin film gas sensor.
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  44. Nagy, Michael; Rowland, Harry D.; Sundaram, Balamurugan, Wireless sensor reader.
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  45. Nagy, Michael; Rowland, Harry D.; Watkins, Roger Dwight; Sundaram, Balamurugan, Wireless sensor reader.
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  46. Rowland, Harry D.; Walking, Roger Dwight; Sundaram, Balamurugan; Paul, Bryan; Ahn, In Soo; Nagy, Michael, Wireless sensor reader.
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  47. Rowland, Harry D.; Watkins, Roger Dwight; Sundaram, Balamurugan, Wireless sensor reader.
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  48. Rowland, Harry D.; Watkins, Roger Dwight; Sundaram, Balamurugan; Paul, Brian; Ahn, In Soo; Nagy, Michael, Wireless sensor reader.
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  49. Rowland, Harry; Watkins, Roger; Sundaram, Balamurugan, Wireless sensor reader.
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  50. Rowland, Harry; Watkins, Roger; Sundaram, Balamurugan, Wireless sensor reader.
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