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Process for making diamond, and doped diamond films at low temperature 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-016/00
  • C23C-016/26
  • C23C-016/48
  • C23C-016/50
출원번호 US-0374966 (1989-06-30)
발명자 / 주소
  • Desphandey Chandra V. (Los Angeles CA) Bunshah Rointan F. (Playa del Rey CA) Doerr Hans J. (Westlake Village CA)
출원인 / 주소
  • The Regents of the Univ. of Calif. (Oakland CA 02)
인용정보 피인용 횟수 : 56  인용 특허 : 3

초록

A process and apparatus that may be used for the production of diamond and doped diamond films at high rates by activated reactive vapor deposition. Carbon is evaporated in a vacuum chamber in the presence of atomic hydrogen containing plasma to form diamond precursors which then deposit on a substr

대표청구항

A process for depositing a film consisting essentially of diamond on a substrate, said process comprising the steps of: supporting a substrate in a vacuum; evaporating a source of carbon to produce carbon atoms in a zone between the source of carbon and the substrate; introducing a hydrogen containi

이 특허에 인용된 특허 (3)

  1. Sakamoto Masakatsu (Tokyo JPX) Ohta Shuhei (Tokyo JPX) Iwakura Shiro (Tokyo JPX) Yamazaki Kaoru (Tokyo JPX) Yaguchi Yoichi (Tokyo JPX) Toshima Hiroaki (Tokyo JPX) Sato Tsugio (Tokyo JPX), Method for forming a hard carbon thin film on article and applications thereof.
  2. Schachner Herbert (Grand-Lancy CHX) Tippmann Heinz (Le Lignon CHX) Lux Benno (Scuol/Gr CHX) Stjernberg Klas G. (Huddinge SEX) Thelin Anders G. (Vllingby SEX), Method for making a composite body coated with one or more layers of inorganic materials including CVD diamond.
  3. Desphandey Chandra V. (Los Angeles CA) Bunshah Rointan F. (Playa del Ray CA) Doerr Hans J. (Simi Valley CA), Process for making diamond, doped diamond, diamond-cubic boron nitride composite films.

이 특허를 인용한 특허 (56)

  1. Falabella Steven, Amorphous diamond films.
  2. Dearnaley Geoffrey ; Lankford ; Jr. James, Application of diamond-like carbon coatings to cobalt-cemented tungsten carbide components.
  3. Goel Arvind (Buffalo NY) Bray Donald J. (East Amherst NY) Martin Steven C. (Williamsville NY) Blakely Keith A. (Buffalo NY), Capacitive thin films using diamond-like nanocomposite materials.
  4. Ederyd Stefan S. O.,SEX ; Soderberg E. K. Staffen,SEX ; Fischer Udo K. R.,SEX, Cemented carbide body for rock drilling mineral cutting and highway engineering.
  5. Yoshida Katsuhito (Itami JPX) Tsuji Kazuwo (Itami JPX), Composite material.
  6. Moran Mark B. ; Johnson Linda F. ; Klemm Karl A., Deposition of high quality diamond film on refractory nitride.
  7. Collins John Lloyd,GBX, Diamond.
  8. Dorfman Veniamin F. ; Goel Arvind, Diamond-like nanocomposite corrosion resistant coatings.
  9. Arvind Goel ; Craig Anthony Outten ; Chandra Venkatraman ; Philip Swab, Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings.
  10. Goel Arvind ; Outten Craig Anthony, Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings.
  11. Dorfman Veniamin F. ; Goel Arvind ; Bray Donald J., Erosion resistant diamond-like nanocomposite coatings for optical components.
  12. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S.; Thomas, Kurt, Faucet.
  13. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  14. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  15. Brondum, Klaus; Welty, Richard P.; Jonte, Patrick B.; Richmond, Douglas S., Faucet component with coating.
  16. Brondum, Klaus, Faucet with wear-resistant valve component.
  17. Donald J. Bray ; Chandra Venkatraman ; Craig A. Outten ; Christopher Halter ; Arvind Goel, Fluorine-doped diamond-like coatings.
  18. Krisko,Annette J.; Hartig,Klaus, Graded photocatalytic coatings.
  19. Krisko, Annette J.; Bond, Bob; Stanek, Roger; Pfaff, Gary; Hartig, Klaus, Low-emissivity, soil-resistant coating for glass surfaces.
  20. Myli, Kari B.; Krisko, Annette J.; German, John R.; Hartig, Klaus, Low-maintenance coating technology.
  21. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
  22. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James E., Low-maintenance coatings.
  23. Krisko, Annette J.; Myli, Kari; Pfaff, Gary L.; Brownlee, James, Low-maintenance coatings.
  24. Krisko, Annette J.; Myli, Kari; Pfaff, Gary L.; Brownlee, James, Low-maintenance coatings.
  25. Myli, Kari B.; Krisko, Annette J.; Brownlee, James E.; Pfaff, Gary L., Low-maintenance coatings, and methods for producing low-maintenance coatings.
  26. Dearnaley Geoffrey ; Lankford ; Jr. James, Medical implants made of metal alloys bearing cohesive diamond like carbon coatings.
  27. Yamanaka,Hideo; Kaise,Kikuo, Method and apparatus for film deposition.
  28. Nakaue, Hirokazu; Kurokawa, Hideo; Mitani, Tsutomo, Method for forming thin film and apparatus therefor.
  29. Ting Jyh-Ming ; Lake Max Laverne, Method for making a carbon-carbon composite.
  30. Goel Arvind ; Bray Donald J., Method for preserving precision edges using diamond-like nanocomposite film coatings.
  31. Welty,Richard P.; Brondum,Klaus; Richmond,Douglas S.; Jonte,Patrick B., Method of forming a wear resistant component.
  32. Martinez,Gonzalo, Method of manufacture of smart microfluidic medical device with universal coating.
  33. Anton, Bryce; Welty, Richard P.; Sullivan, Patrick, Method of producing an article having patterned decorative coating.
  34. Krisko,Annette J.; Bond,Bob; Stanek,Roger; Pfaff,Gary; Hartig,Klaus, Methods and apparatuses for depositing film on both sides of a pane.
  35. Myli, Kari; Pfaff, Gary; Brownlee, James; German, John; Krisko, Annette; Hartig, Klaus, Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films.
  36. Dearnaley Geoffrey, Non-irritating antimicrobial coating for medical implants and a process for preparing same.
  37. Dearnaley Geoffrey, Non-irritating antimicrobial coating for medical implants and a process for preparing same.
  38. Geoffrey Dearnaley, Non-irritating antimicrobial coating for medical implants and a process for preparing same.
  39. Krisko, Annette J.; Myli, Kari B.; Pfaff, Gary L.; Brownlee, James, Opposed functional coatings having comparable single surface reflectances.
  40. Bunshah Rointan F. ; Doerr Hans J. ; Jou Shyankay, Plasma enhanced chemical transport process for forming diamond films.
  41. Sathrum Paul E. ; Coll Bernard F., Plasma enhancement apparatus and method for physical vapor deposition.
  42. Fu, Xinyu; Forster, John; Yu, Jick; Bhatnagar, Ajay; Gopalraja, Praburam, Remote plasma pre-clean with low hydrogen pressure.
  43. Fairbourn,David C., Simple chemical vapor deposition system and methods for depositing multiple-metal aluminide coatings.
  44. Fairbourn, David C., Simple chemical vapor deposition systems for depositing multiple-metal aluminide coatings.
  45. Martinez, Gonzalo, Smart microfluidic device with universal coating.
  46. Krisko, Annette J.; Bond, Bob; Stanek, Roger; Pfaff, Gary; Hartig, Klaus, Soil-resistant coating for glass surfaces.
  47. Krisko, Annette J.; Hartig, Klaus; O'Shaughnessy, Roger D., Soil-resistant coating for glass surfaces.
  48. Krisko, Annette; Hartig, Klaus; O'Shaughnessy, Roger D., Soil-resistant coating for glass surfaces.
  49. Krisko,Annette J.; Bond,Bob; Stanek,Roger; Pfaff,Gary; Hartig,Klaus, Soil-resistant coating for glass surfaces.
  50. Brabender, Dennis M; Kokoschke, Jeffrey L, Sputtering apparatus including target mounting and control.
  51. Dearnaley Geoffrey ; Lankford ; Jr. James, Treatments to reduce friction and wear on metal alloy components.
  52. Dearnaley Geoffrey (San Antonio TX) Lankford ; Jr. James (San Antonio TX), Treatments to reduce frictional wear between components made of ultra-high molecular weight polyethylene and metal alloy.
  53. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
  54. Brondum, Klaus; Welty, Richard P.; Richmond, Douglas S.; Jonte, Patrick B.; Thomas, Kurt, Valve component for faucet.
  55. Welty,Richard P.; Brondum,Klaus; Richmond,Douglas S.; Jonte,Patrick B., Valve component with improved wear resistance.
  56. Welty, Richard P.; Brondum, Klaus; Richmond, Douglas S.; Jonte, Patrick B., Valve component with multiple surface layers.
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