초록 ▼

An automatic refill system for a liquid chemical temperature controller is provided wherein replenishing liquid chemical is automatically supplied from a chemical bulk supply to a bubbler ampule in the liquid chemical temperature controller based on sensed level depths in a manner that avoids contam

An automatic refill system for a liquid chemical temperature controller is provided wherein replenishing liquid chemical is automatically supplied from a chemical bulk supply to a bubbler ampule in the liquid chemical temperature controller based on sensed level depths in a manner that avoids contamination of the replenishing chemical.

대표청구항 ▼

An automatic refill system for refilling an ultra high purity liquid chemical in a working container from a bulk supply chemical container without removing the working container from its working apparatus, comprising in combination: (a) at least one working container for receiving retaining and disp

An automatic refill system for refilling an ultra high purity liquid chemical in a working container from a bulk supply chemical container without removing the working container from its working apparatus, comprising in combination: (a) at least one working container for receiving retaining and dispensing the liquid chemical and having a bottom, a top and an intermediate surface connecting the bottom and the top, the container further having a gas-liquid interface below the top; (b) a single housing corresponding to the at least one working container removably retaining the working container and having a liquid temperature visual display, liquid temperature set point means, heating means and alarm means for audially or visually signaling low liquid chemical level conditions; (c) a bulk supply chemical container connected to the working container via a flow conduit for refilling the working container with the liquid chemical; (d) level sensor means cooperative with the working container to sense the level of chemical and to control the refill of the working container with the chemical, the sensor means sensing an automatic fill start point chemical level and an automatic fill stop point chemical level; (e) transmission means to transmit the sensed level of the chemical; (f) control means to receive the sensed level of chemical from the transmission means and transmit an output signal in response to the received sensed level; (g) actuator means connected to the control means and the flow conduit, the actuator means being responsive to the output signals of the control means to permit flow from the bulk supply chemical container when the automatic fill start point chemical level sensing has been received and to stop the flow from the bulk supply chemical container when the automatic fill stop point chemical level sensing has been received; (h) a refill tube in the working container connected to the flow conduit to deliver the chemical from the bulk supply container to the working container adjacent the bottom to not disturb the gas-liquid interface during refill; (i) temperature sensing means to sense the temperature of the liquid chemical in the working container, the temperature sensing means being connected to a visual display in the housing; and (j) second level sensor means for sensing the level of liquid in the bulk supply chemical container connected to the control means to transmit the sensings thereto.