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Dual track handling and processing system

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-001/06
출원번호 US-0452449 (1989-12-18)
발명자 / 주소
  • Hughes John L. (Rodeo CA) Shula Thomas E. (Palo Alto CA) Rodriguez Carlos E. (Redwood City CA)
출원인 / 주소
  • Varian Associates, Inc. (Palo Alto CA 02)
인용정보 피인용 횟수 : 38  인용 특허 : 12

초록

A dual track substrate handling and processing system includes an entrance load lock station, an exit load lock station and a plurality of substrate processing stations, all positioned above a transfer vacuum chamber. The load lock station and each processing station are configured to hold two verti

대표청구항

A system for handling and processing thin workpieces, said workpieces being vertically oriented during said handling and processing, said system comprising: a transfer chamber; an entrance load lock station; a plurality of processing stations; an exit load lock station, each of said stations being p

이 특허에 인용된 특허 (12)

  1. Prentakis Antonios E. (Cambridge MA), Apparatus and method for loading and unloading wafers.
  2. Gallego JosM. (Ormskirk GB2), Apparatus for the deposition of multi-layer coatings.
  3. Mahler Peter (Hainburg DEX), Apparatus for the quasi-continuous treatment of substrates.
  4. Takahashi Nobuyuki (Tokyo JPX) Sugimoto Ryuji (Tokyo JPX) Shirai Yasuyuki (Tokyo JPX), Automatic loader.
  5. Southworth Peter R. (Mission Viejo CA) Baxter Gregory R. (Orange CA), Conveyor system.
  6. Boys Donald R. (Cupertino CA) Graves Walter E. (San Jose CA), Disk or wafer handling and coating system.
  7. Wooding Michael J. (Sunnyvale CA) Cardema Rudolfo S. (San Jose CA) Ramiller Charles L. (Santa Clara CA), Method and system for loading wafers.
  8. Rubin Richard H. (Fairfield NJ) Petrone Benjamin J. (Netcong NJ) Heim Richard C. (Mountain View CA) Pawenski Scott M. (Wappingers Falls NY), Modular processing apparatus for processing semiconductor wafers.
  9. Stark Lawrence R. (San Jose CA) Turner Frederick (Sunnyvale CA), Modular wafer transport and processing system.
  10. Fisher ; Jr. Daniel J. (Chelmsford MA), Wafer handling station.
  11. Sanders John D. (Orange CA) Taylor Jerry A. (Corona CA), Wafer transfer stand.
  12. Corville Richard E. (Alameda CA), Workpiece accumulating and transporting apparatus.

이 특허를 인용한 특허 (38)

  1. Bujak, John Stanislaus; Stirniman, Michael Joseph, Apparatus for inline continuous and uniform ultraviolet irradiation of recording media.
  2. Davis,Jeffry A.; Nelson,Gordon Ray; Bexten,Daniel P., Automated processing system.
  3. Davis, Jeffry A.; Meyer, Kevin P.; Dolechek, Kert L., Automated semiconductor processing system.
  4. Nelson, Gordon Ray; Bexten, Daniel P.; Davis, Jeffry A., Automated semiconductor processing system.
  5. Nelson, Gordon Ray; Bexten, Daniel P.; Davis, Jeffry A., Automated semiconductor processing system.
  6. Reynolds Glyn J. ; Hillman Joseph T., Buffer chamber for integrating physical and chemical vapor deposition chambers together in a processing system.
  7. Hofmeister Christopher A., Coaxial drive elevator.
  8. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  9. Bachrach, Robert Z., Compact apparatus and method for storing and loading semiconductor wafer carriers.
  10. Aruga Yoshiki,JPX ; Kamikura Yo,JPX, Compact in-line film deposition system.
  11. Putzi,Christian, Device and method for transporting wafer-shaped articles.
  12. Nguyen Hoang ; Harper Bruce M., Disc-handling apparatus.
  13. Fairbairn, Kevin P.; Bluck, Terry; Marion, Craig; Weiss, Robert E., Disk coating system.
  14. Inoue Yoshiyasu,JPX ; Hara Masakatsu,JPX, Display panel transporting apparatus and a display panel transporting unit.
  15. Hertel, Richard J.; Allen, Jr., Ernest E.; McGrail, Jr., Philip J., Dual sided workpiece handling.
  16. Hertel, Richard J.; Allen, Jr., Ernest E.; McGrail, Jr., Philip J., Dual sided workpiece handling.
  17. Nakamura Hiroto,JPX, IC testing apparatus.
  18. Takahashi,Nobuyuki, Interback-type substrate processing device.
  19. Henley, Francois J., Method and structure for fabricating multiple tiled regions onto a plate using a controlled cleaving process.
  20. Henley, Francois J, Method and structure for fabricating solar cells using a layer transfer process.
  21. Henley, Francois J.; Ong, Philip James, Method and structure for fabricating solar cells using a layer transfer process.
  22. Henley, Francois J., Method and system for continuous large-area scanning implantation process.
  23. Aruga Yoshiki,JPX ; Maeda Koji,JPX, Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus.
  24. Elliott, Martin R.; Shah, Vinay K.; Englhardt, Eric A.; Hudgens, Jeffrey C., Methods for moving a substrate carrier.
  25. Shah, Vinay K.; Koshti, Sushant S., Methods, systems and apparatus for rapid exchange of work material.
  26. Keigler, Arthur; Goodman, Daniel L.; Guarnaccia, David G., Parallel single substrate marangoni module.
  27. Keigler, Arthur; Fisher, Freeman; Goodman, Daniel L., Parallel single substrate processing system.
  28. Keigler, Arthur; Fisher, Freeman; Goodman, Daniel L.; Haynes, Jonathan, Parallel single substrate processing system.
  29. Keigler, Arthur, Parallel single substrate processing system with alignment features on a process section frame.
  30. Sakurai, Kunihiko; Togawa, Tetsuji; Takada, Nobuyuki; Wakabayashi, Satoshi; Saito, Kenichiro; Sekimoto, Masahiko; Hayama, Takuji; Koga, Daisuke, Polishing apparatus.
  31. Ishizawa, Shigeru; Saeki, Hiroaki, Processed body carrying device, and processing system with carrying device.
  32. Bluck, Terry; Scollay, Stuart; Tong, Edric, Processing thin wafers.
  33. Bluck, Terry; Scollay, Stuart; Tong, Edric, Processing thin wafers.
  34. Takahashi, Nobuyuki, Substrate processing device and through-chamber.
  35. Soraoka, Minoru; Yoshioka, Ken; Kawasaki, Yoshinao, Vacuum processing apparatus and semiconductor manufacturing line using the same.
  36. Kester, Norman L.; Leidecker, Cliff J.; Glarum, John B., Vapor deposition system and method.
  37. Kester, Norman L; Leidecker, Cliff J., Vapor deposition system and method.
  38. Buitron, Gerardo; Grow, John, W-patterned tools for transporting/handling pairs of disks.
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