초록 ▼

A contour measuring apparatus and method of using the same is disclosed to measure the three-dimensional contour of a surface. Structure is provided to direct first light beams onto the surface being measured. Reflections of the first light beams from the surface are received for generating electric

A contour measuring apparatus and method of using the same is disclosed to measure the three-dimensional contour of a surface. Structure is provided to direct first light beams onto the surface being measured. Reflections of the first light beams from the surface are received for generating electrical output signals corresponding to electro-optically measurable optical images. The output signals are electrically processed to determine the radius of curvature of the surface being measured. A higher spatial resolution can be achieved without changing the spacing of the array of light points.

대표청구항 ▼

A contour measuring apparatus to measure the three-dimensional contour of a surface, comprising: a multi-point light source to direct a plurality of individual light beams each corresponding to individual light points of the multi-point light source onto the surface being measured; said multi-point

A contour measuring apparatus to measure the three-dimensional contour of a surface, comprising: a multi-point light source to direct a plurality of individual light beams each corresponding to individual light points of the multi-point light source onto the surface being measured; said multi-point light source comprising first and second groups of individual light points; the individual light points of the first group being interspersed between the individual light points of the second group; means for sequentially pulsing on said first and second groups; photodetector means receiving reflections of the first and second groups of individual light beams from said surface being measured for generating first and second groups of electrical output signals corresponding to electro-optically measurable optical images, each of said optical images corresponding to one of said light points; means receiving said first and second groups of electrical output signals from said photodetector for measuring the position of each optical image in the photodetector and for determining the average radius of curvature of the measured surface.