초록 ▼

A transferring apparatus comprises a vacuum chamber, a carrier member disposed inside a pipe which communicates with the vacuum chamber, magnetic means installed in a support structure which is moved by a driving means. The carrier member is floated and pulled in its axial direction by magnetic forc

A transferring apparatus comprises a vacuum chamber, a carrier member disposed inside a pipe which communicates with the vacuum chamber, magnetic means installed in a support structure which is moved by a driving means. The carrier member is floated and pulled in its axial direction by magnetic force produced by the magnetic means, whereby an object placed on the tip of a manipulator arm which is connected to the carrier member is transferred in the vacuum chamber. Since the carrier member is floated inside the pipe and moved in its axial direction without contact to the pipe or any other parts, there are no portions inside the pipe which relatively move in contact with each other, and thus fine particles are not generated inside the pipe. This effectively eliminates adhesion of fine particles to objects such as semiconductor devices being transferred in a vacuum chamber.

대표청구항 ▼

A transferring apparatus operated in a vacuum chamber comprising: a vacuum chamber communicating with a pipe of nonmagnetic material; a carrier member formed with a magnetic material and having a manipulator arm which extends into said vacuum chamber, said carrier member being disposed movable in th

A transferring apparatus operated in a vacuum chamber comprising: a vacuum chamber communicating with a pipe of nonmagnetic material; a carrier member formed with a magnetic material and having a manipulator arm which extends into said vacuum chamber, said carrier member being disposed movable in the axial direction within said pipe; magnetic means for radially floating and axially pulling said carrier member by magnetic force, said magnetic means being disposed facing the periphery of said carrier member through the wall of said pipe; support means movably disposed along said pipe which passes through said support means, and including therein said magnetic means; driving means for shifting said support means along said pipe; and tilt driving means for tilting the manipulator arm upward and downward relative to said pipe in said vacuum chamber.