초록 ▼

A reticle conveying system includes a reticle keeping shelf for keeping therein a plurality of reticles; a first conveying portion for selecting and extracting a desired reticle out of the reticle keeping shelf and for conveying the extracted reticle to a predetermined position; and a second conveyi

A reticle conveying system includes a reticle keeping shelf for keeping therein a plurality of reticles; a first conveying portion for selecting and extracting a desired reticle out of the reticle keeping shelf and for conveying the extracted reticle to a predetermined position; and a second conveying portion for conveying the reticle from the predetermined position back into the reticle keeping shelf; wherein the first conveying portion is operable to convey the extracted reticle to the predetermined position by way of a first conveying path defined exclusively for the reticle as it is conveyed to the predetermined position and wherein said second conveying portion is operable to convey the reticle back into the reticle keeping shelf by way of a second conveying path different from the first conveying path and defined exclusively for the reticle as it is conveyed back into the reticle keeping shelf.

대표청구항 ▼

A reticle conveying system usable with a reticle keeping shelf having a plurality of supports for supporting a plurality of reticles, for conveying a reticle between the keeping shelf and an exposure station, said system comprising: a first conveying mechanism for conveying a reticle along a first p

A reticle conveying system usable with a reticle keeping shelf having a plurality of supports for supporting a plurality of reticles, for conveying a reticle between the keeping shelf and an exposure station, said system comprising: a first conveying mechanism for conveying a reticle along a first path extending between the keeping shelf and the exposure station; a second conveying mechanism for conveying a reticle along a second path, different from the first path, and extending between an intermediate position along the first path and an inspecting station, different from the exposure station; and inspecting means provided at the inspecting station for inspecting a reticle conveyed thereto; wherein said first and second conveying mechanisms are operable so that during exposure of a first reticle at the exposure station, a second reticle is conveyed to the inspecting station for inspection thereof.