초록 ▼

A wafer transfer apparatus used in manufacturing high density semiconductor products is disclosed which includes at least three movable arms for supporting a wafer from below thereby preventing contact with the active surface of the wafer. A mechanism for moving the arms into and out of its wafer su

A wafer transfer apparatus used in manufacturing high density semiconductor products is disclosed which includes at least three movable arms for supporting a wafer from below thereby preventing contact with the active surface of the wafer. A mechanism for moving the arms into and out of its wafer supporting position is diposed, in part, above the wafer when a wafer is supported thereby. The portions of the actuator mechanism disposed above the wafer are constructed in a way such that no sliding contact occurs between elements thereof. Sliding contact between elements disposed above a wafer has proved to produce microscopic particles which can fall onto the active surface of the wafer thereby contaminating the circuits contained thereon. As sliding contact is avoided by the apparatus of the present invention, contamination particles produced within the wafer transfer apparatus is substantially reduced, if not entirely eliminated.

대표청구항 ▼

An apparatus capable of carrying a disk shaped wafer and eliminating particulate contamination due to sliding contact comprising, in combination: at least three non-deformable arms each having a flange projecting therefrom, each said flange being disposed in a common plane and providing, when said a

An apparatus capable of carrying a disk shaped wafer and eliminating particulate contamination due to sliding contact comprising, in combination: at least three non-deformable arms each having a flange projecting therefrom, each said flange being disposed in a common plane and providing, when said arms are at a wafer carrying position, a plurality of surfaces to support a wafer from below and providing, when said arms are at a wafer disengaging position, the capability to disengage a wafer; and mechanical actuator means including fixed elements and movable elements, said actuator means disposed above and coupled to each of said arms to support said arms and to move said arms simultaneously to either said wafer carrying position or said wafer disengaging position, wherein a first portion of inter-element movement includes rolling and abutting contact, a second portion of inter-element movement includes rolling contact, and a third portion of inter-element movement includes abutting contact.