초록 ▼

Pre- and post-processing of a semiconductor wafer within a main vacuum chamber is accomplished by a wafer holder disposed within a clam shell-like device. The clam shell device includes a first member disposed above the wafer holder and a second member disposed below the wafer holder in a facing rel

Pre- and post-processing of a semiconductor wafer within a main vacuum chamber is accomplished by a wafer holder disposed within a clam shell-like device. The clam shell device includes a first member disposed above the wafer holder and a second member disposed below the wafer holder in a facing relationship to the first member. The first member and the second member each have a respective mating surface. The first member and the second member are movable between a closed position wherein the mating surface of each of the first member and second member hermetically engage each other in an open position. The clam shell device forms an interior chamber when in its closed position. Gases are evacuated from the interior chamber, exteriorally of the main chamber, when the clam shell device is in in a closed position to avoid contamination of the vacuum environment.

대표청구항 ▼

An apparatus to permit processing of a semiconductor wafer within a main vacuum chamber, said apparatus comprising a main vacuum chamber; a wafer holder; a clam shell device including a first member disposed above said wafer holder and a second member disposed below said wafer holder in a facing rel

An apparatus to permit processing of a semiconductor wafer within a main vacuum chamber, said apparatus comprising a main vacuum chamber; a wafer holder; a clam shell device including a first member disposed above said wafer holder and a second member disposed below said wafer holder in a facing relationship to said first member, said first member and said second member each having a respective mating surface, said first member and said second member being movable between an open position and a closed position wherein said mating surface of said first member is hermetically engaged with said mating surface of said second member, said clam shell device forming an interior chamber located inside of and sealed from the main chamber when in said closed position; and means for evacuating gases from said interior chamber exteriorally of said main chamber when said clam shell device is in a closed position.