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Robot slice aligning end effector 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B25J-011/00
출원번호 US-0378496 (1989-07-11)
발명자 / 주소
  • Sullivan Harold W. (Dallas TX) McConnell Pat M. (Lucas TX)
출원인 / 주소
  • Texas Instruments Incorporated (Dallas TX 02)
인용정보 피인용 횟수 : 60  인용 특허 : 13

초록 ▼

An end effector (10) is pivotally affixed to a robot arm (12) and comprises a platform (28) and a catcher (42). In operation, the end effector (10) picks up an integrated circuit slice (S), tilts the platform (28) away from the horizontal, causing the slice (S) to slide into an indexing surface (47)

대표청구항 ▼

Apparatus for positioning a semiconductor slice relative to a slice carrier, comprising: a horizontal platform for supporting a semiconductor slice thereon; means for tilting said platform away from the horizontal, thereby to cause sliding of said slice on said platform; and an indexer disposed late

이 특허에 인용된 특허 (13)

  1. Takamatsu, Shunicti, Article automatic storage and retrieval apparatus.
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  2. Snyder Michael D. (Chenango Bridge NY) Bates Erwin F. (Binghamton NY), Centering device for automatic placement of chip components in hybrid circuits.
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  3. Ragard Phillip A. (Binghamton NY), Component pick and place spindle assembly with compact internal linear and rotary displacement motors and interchangeabl.
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  4. Monforte Mathew L. (12 Ashwood Rd. Hamilton NJ 08610), Exchangeable multi-function end effector tools.
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  5. Andou Yukinori (Tenri JPX), Industrial robot hand with position sensor.
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  6. Foulke Richard F. (Carlisle MA), Object handling apparatus.
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  7. Takahashi Nobuyuki (Tokyo JPX), Substrate processing apparatus.
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  8. Schwartz Vladimir (Lexington MA) Freytsis Avrum (Swampscott MA), Vacuum pick for semiconductor wafers.
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  9. Judell Neil H. (Jamaica Plain MA) Abbe Robert C. (Newton MA) Poduje Noel S. (Needham Heights MA) Mallory Roy (Bedford MA), Wafer alignment station.
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  10. Wheeler William R. (Saratoga CA) Kudinar Rusmin (Fremont CA) Kren George J. (Los Altos CA) Clementson David D. (Palo Alto CA), Wafer handling apparatus.
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  11. Gerard Rene (Paris FRX) Lacombat Michel (Paris FRX), Wafer loading and positioning device.
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  12. Dimock Jack A. (Santa Barbara CA) Woestenburg Dirk P. (Summerland CA), Wafer processing machine with evacuated wafer transporting and storage system.
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  13. Foulke Richard F. (Carlisle MA) Lord Steven M. (Malden MA), Wafer transfer apparatus.
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이 특허를 인용한 특허 (60)

  1. Dutta, Debojyoti; Sen, Mainak; Pandey, Manoj Kumar; Banka, Tarun; Balakrishnan, Raja Suresh Krishna, Aggregating sensor data.
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  2. Berger, Alexander J.; Kretz, Frank E., Alignment of semiconductor wafers and other articles.
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  3. Berger, Alexander J.; Kretz, Frank E., Alignment of semiconductor wafers and other articles.
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  4. Berger,Alexander J.; Kretz,Frank E., Alignment of semiconductor wafers and other articles.
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  5. Pfeilschifter, Thomas; Lang, Edwin, Apparatus for the transfer of plates from a plate transport device to a plate storage rack or similar device.
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  6. Berger, Alexander J.; Kretz, Frank E.; Casarotti, Sean A., Article holders and article positioning methods.
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  7. Kretz, Frank E.; Berger, Alexander J.; Casarotti, Sean A., Article holders with sensors detecting a type of article held by the holder.
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  8. Kretz,Frank E.; Berger,Alexander J.; Casarotti,Sean A., Article holders with sensors detecting a type of article held by the holder.
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  9. Kretz, Frank E.; Berger, Alexander J.; Casarotti, Sean A., Articles holders with sensors detecting a type of article held by the holder.
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  10. Sullivan, Robert; Toebes, Stephen C., Automated bot transfer arm drive system.
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  11. Sullivan, Robert; Toebes, Stephen C., Automated bot transfer arm drive system.
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  13. Toebes, Stephen C.; Holwell, Justin, Autonomous transport vehicle.
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  14. Lert, John; Toebes, Stephen; Sullivan, Robert; Hinshaw, Foster D.; Ulrich, Nathan, Autonomous transports for storage and retrieval systems.
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  15. Sullivan, Robert; Lert, John; Toebes, Stephen C.; Hinshaw, Foster; Ulrich, Nathan, Autonomous transports for storage and retrieval systems.
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  16. Toebes, Stephen C.; Sullivan, Robert; Buzan, Forrest, BOT payload alignment and sensing.
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  17. Sullivan, Robert; Buzan, Forrest; Toebes, Stephen C.; Eccles, Andrew, Bot having high speed stability.
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  18. Sullivan, Robert; Buzan, Forrest; Toebes, Stephen C.; Eccles, Andrew, Bot having high speed stability.
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  19. Sullivan, Robert; Toebes, Stephen C.; Buzan, Forrest; Eccles, Andrew, Bot having high speed stability.
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  20. Sullivan, Robert; Toebes, Stephen C.; Buzan, Forrest; Eccles, Andrew, Bot having high speed stability.
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  21. Toebes, Stephen C.; Sullivan, Robert; Buzan, Forrest, Bot payload alignment and sensing.
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  22. Toebes, Stephen C.; Sullivan, Robert; Buzan, Forrest, Bot payload alignment and sensing.
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  23. Toebes, Stephen C.; Sullivan, Robert; Buzan, Forrest, Bot payload alignment and sensing.
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  24. Tsuji,Shinjiro; Nishimoto,Tomotaka; Murata,Takahiko; Ida,Masayuki, Component mounting apparatus and component mounting method, and recognition apparatus for a component mount panel, component mounting apparatus for a liquid crystal panel, and component mounting meth.
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  25. Lert, John; Toebes, Stephen; Sullivan, Robert; Hinshaw, Foster D.; Ulrich, Nathan; Peters, Eric, Control system for storage and retrieval systems.
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  26. Hunter,Thomas B., Cutter assembly for extruding shaped food pieces.
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  27. Casarotti, Sean A.; Berger, Alexander J.; Kretz, Frank E., Detection and handling of semiconductor wafer and wafer-like objects.
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  28. Casarotti, Sean A.; Berger, Alexander J.; Kretz, Frank E., Detection and handling of semiconductor wafers and wafer-like objects.
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  29. Casarotti,Sean A.; Berger,Alexander J.; Kretz,Frank E., Detection and handling of semiconductor wafers and wafer-like objects.
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  30. Casarotti,Sean A.; Berger,Alexander J.; Kretz,Frank E., Detection and handling of semiconductor wafers and wafers-like objects.
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  31. Chean, Khoon H., Disk handling apparatus and method for supporting a disk during material deposition at a deposition station.
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  32. Jamieson, Jon; Eng, Franco; Sundararajan, Srinivasan; Kreger, Troy; Belenky, Sasha; Kojangian, Janry, End effector.
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  33. Begin Robert George, End effector assembly for inclusion in a system for producing uniform deposits on a wafer.
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  34. Jeff Brodine ; Dan Marohl, End effector for wafer handler in processing system.
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  35. Pandey, Manoj Kumar; Banka, Tarun; Dutta, Debojyoti; Sen, Mainak; Balakrishnan, Raja Suresh Krishna, Indexing sensor data.
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  36. Tan, Mark K.; Kopec, Nicholas M.; Blank, Richard M., Mass damper for semiconductor wafer handling end effector.
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  37. Bevirt, JoeBen; Brinton, Gabriel Noah, Method and apparatus for shuttling microtitre plates.
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  38. Kim,Ki Sang, Method and apparatus for transferring a wafer.
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  41. Genov ; deceased Genco, Prealigner and planarity teaching station.
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  43. Zila Vladimir,CAX ; Berner Robert W. ; Woodruff Daniel J., Processing head for semiconductor processing machines.
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  46. Kimura, Yasutomo, Robot hand.
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  50. Nishida, Hiroaki, Substrate holding mechanism, substrate transporting device, and semiconductor manufacturing apparatus.
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  52. Toebes, Stephen C.; Sullivan, Robert, Suspension system for autonomous transports.
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  55. Nostrant, Tom, Systems and methods for providing an improved bicycle stand.
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  56. Kiaie, Jubin; Dadiomov, Alex, Vacuum actuated end effector.
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  57. Balg Christian,CHX ; Strasser Bernhard,CHX ; Blattner Jakob,CHX, Wafer gripping device adapted to swivel wafers taken from a horizontal position in a storage container.
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  58. Howells John ; Gorman Andrew P. ; Peltola Randall W., Wafer handling system and method.
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  59. Somekh Sasson (Los Altos Hills CA) Fairbairn Kevin (Saratoga CA) Kolstoe Gary M. (Fremont CA) White Gregory W. (San Carlos CA) Faraco ; Jr. W. George (Saratoga CA), Wafer tray and ceramic blade for semiconductor processing apparatus.
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  60. Somekh Sasson (Los Altos Hills CA) Fairbairn Kevin (Saratoga CA) Kolstoe Gary M. (Fremont CA) White Gregory W. (San Carlos CA) Faraco ; Jr. W. George (Saratoga CA), Wafer tray and ceramic blade for semiconductor processing apparatus.
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