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Metal material with film passivated by fluorination and apparatus composed of the metal material 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23F-020/06
출원번호 US-0381914 (1989-07-19)
우선권정보 JP-0181225 (1988-07-20); JP-0006892 (1989-01-13)
발명자 / 주소
  • Ohmi Tadahiro (2-1-17-302
  • Komegafukuro Sendai-shi
  • Miyagi-ken JPX) Miki Masahiro (23-14-521
  • Tezukayama 1-Chome Abeno-ku
  • Osaka JPX) Kikuyama Hirohisa (7-13
  • 3-Cho
  • Ayameike Kita Nara-shi
  • Na
인용정보 피인용 횟수 : 48  인용 특허 : 1

초록 ▼

A metal material characterized in that a film passivated by fluorination which is mainly composed of a metal fluoride substantially satisfying stoichiometric ratio is formed at least partially on a surface of a metal of the metal material, and an apparatus at least partially composed of the metal ma

대표청구항 ▼

A metal material comprising a metal substrate, and a passivated film formed on at least a portion of the surface of the metal substrate by fluorination of the metal substrate, said film being composed mainly of a metal fluoride in which the proportion of metal to fluorine is substantially in stoichi

이 특허에 인용된 특허 (1)

  1. Tarancon Gregorio (Woodbridge NJ), Halogenation treatment.
    상세보기

이 특허를 인용한 특허 (48)

  1. Chen, Xin; Aswath, Pranesh B.; Elsenbaumer, Ronald L., Alkylphosphorofluoridothioates having low wear volume and methods for synthesizing and using same.
    상세보기
  2. Klawuhn, Erich R.; Rozbicki, Robert; Dixit, Girish A., Apparatus and methods for deposition and/or etch selectivity.
    상세보기
  3. Klawuhn,Erich R.; Rozbicki,Robert; Dixit,Girish A., Apparatus and methods for deposition and/or etch selectivity.
    상세보기
  4. Heyse, John V.; Mulaskey, Bernard F.; Innes, Robert A.; Hagewiesche, Daniel P.; Hubred, Gale L.; Moore, Steven C.; Bryan, Paul F.; Hise, Robert L.; Trumbull, Steven E.; Harris, Randall J., Apparatus for hydrocarbon processing.
    상세보기
  5. Pradhan, Anshu A.; Rozbicki, Robert, Atomic layer profiling of diffusion barrier and metal seed layers.
    상세보기
  6. Pradhan, Anshu A.; Rozbicki, Robert, Atomic layer profiling of diffusion barrier and metal seed layers.
    상세보기
  7. Toyoda Yoshihiko,JPX ; Fukada Tetsuo,JPX ; Mori Takeshi,JPX ; Hasegawa Makiko,JPX, CVD apparatus for Cu formation.
    상세보기
  8. F. Conrad Greer, Catalyzed compositions and methods for use in vehicle surface anti-icing and other applications.
    상세보기
  9. Greer F. Conrad, Catalyzed lubricant additives and catalyzed lubricant systems designed to accelerate the lubricant bonding reaction.
    상세보기
  10. Greer F. Conrad, Catalyzed surface composition altering and surface coating formulations and methods.
    상세보기
  11. Shaviv, Roey; Gopinath, Sanjay; Holverson, Peter; Pradhan, Anshu A., Conformal films on semiconductor substrates.
    상세보기
  12. Shaviv, Roey; Gopinath, Sanjay; Holverson, Peter; Pradhan, Anshu A., Conformal films on semiconductor substrates.
    상세보기
  13. Heyse John V. ; Kunze Alan G., Cracking processes.
    상세보기
  14. Behm, Philip E.; McDermott, Wayne Thomas; Xiao, Manchao; Pearlstein, Ronald Martin; Lo, Sai-Hong A.; Derecskei-Kovacs, Agnes, Cylinder surface treated container for monochlorosilane.
    상세보기
  15. Wu, Hui-Jung; Juliano, Daniel R.; Wu, Wen; Dixit, Girish, Deposition of doped copper seed layers having improved reliability.
    상세보기
  16. Dulkin, Alexander; Vijayendran, Anil; Yu, Tom; Juliano, Daniel R., Deposition of thin continuous PVD seed layers having improved adhesion to the barrier layer.
    상세보기
  17. Ohmi Tadahiro,JPX ; Sano Naoto,JPX ; Shirai Yasuyuki,JPX, Discharge electrode, shape-restoration thereof, excimer laser oscillator, and stepper.
    상세보기
  18. Nakao, Kiyoharu; Nara, Hisashi; Yoshioka, Shunsuke, Excimer laser device.
    상세보기
  19. Ohmi Tadahiro,JPX ; Shirai Yasuyuki,JPX ; Sano Naoto,JPX, Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface.
    상세보기
  20. Ohmi Tadahiro,JPX ; Tanaka Nobuyoshi,JPX, Excimer laser oscillation apparatus.
    상세보기
  21. Ohmi Tadahiro,JPX ; Tanaka Nobuyoshi,JPX ; Hirayama Masaki,JPX, Excimer laser oscillation apparatus and method, excimer laser exposure apparatus, and laser tube.
    상세보기
  22. Ohmi, Tadahiro; Osawa, Hiroshi; Tanaka, Nobuyoshi; Ino, Kazuhide; Shinohara, Toshikuni; Shirai, Yasuyuki; Hirayama, Masaki, Gas supply path structure for a gas laser.
    상세보기
  23. Heyse, John V.; Hagewiesche, Daniel P.; Spindler, Paul M., Increasing production in hydrocarbon conversion processes.
    상세보기
  24. Ohmi Tadahiro,JPX ; Chiba Kazuo,JPX ; Mikasa Yutaka,JPX ; Ishigaki Kenji,JPX ; Miki Nobuhiro,JPX ; Maeno Matagoro,JPX ; Kikuyama Hirohisa,JPX, Industrial material with fluorine passivated film and process of manufacturing the same.
    상세보기
  25. Watson, Tom A.; Sandstrom, Richard L.; Morton, Richard G.; Weeks, Robert E.; Quitter, John P.; Lewis, Mark R., Laser discharge chamber passivation by plasma.
    상세보기
  26. Watson, Tom A.; Sandstrom, Richard L.; Morton, Richard G.; Weeks, Robert E.; Quitter, John P.; Lewis, Mark R., Laser discharge chamber passivation by plasma.
    상세보기
  27. Ohmi Tadahiro,JPX ; Chiba Kazuo,JPX ; Kume Hideo,JPX ; Mikasa Yutaka,JPX ; Maeno Matagoro,JPX ; Nakagawa Yoshinori,JPX ; Izumi Hiroto,JPX ; Yamane Kazuhito,JPX, Metal material formed with fluorocarbon film, process for preparing the material and apparatus made with use of the mate.
    상세보기
  28. Ohmi Tadahiro,JPX ; Chiba Kazuo,JPX ; Kume Hideo,JPX ; Mikasa Yutaka,JPX ; Maeno Matagoro,JPX ; Nakagawa Yoshinori,JPX ; Izumi Hiroto,JPX ; Yamane Kazuhito,JPX, Metal material formed with fluorocarbon film, process for preparing the material and apparatus made with use of the material.
    상세보기
  29. Ohtani,Teruyuki; Tsuji,Makoto; Utsunomiya,Masao, Metal separator for fuel cell and production method therefor.
    상세보기
  30. Pradhan, Anshu A.; Hayden, Douglas B.; Kinder, Ronald L.; Dulkin, Alexander, Method and apparatus for increasing local plasma density in magnetically confined plasma.
    상세보기
  31. Danek, Michal; Rozbicki, Robert, Method for depositing a diffusion barrier for copper interconnect applications.
    상세보기
  32. Dennis L. Holtermann ; Hong Chiu Chen ; Richard M Wolpert ; Charles R. Wilson ; Daniel P. Hagewiesche, Method for removing reactive metal from a reactor system.
    상세보기
  33. Holtermann, Dennis L.; Chen, Hong Chiu; Wolpert, Richard M; Wilson, Charles R.; Hagewiesche, Daniel P., Method for removing reactive metal from a reactor system.
    상세보기
  34. Rozbicki, Robert T.; Danek, Michal; Klawuhn, Erich R., Method of depositing a diffusion barrier for copper interconnect applications.
    상세보기
  35. Rozbicki, Robert; Danek, Michal; Klawuhn, Erich, Method of depositing a diffusion barrier for copper interconnect applications.
    상세보기
  36. Rozbicki, Robert; Danek, Michal; Klawuhn, Erich, Method of depositing a diffusion barrier for copper interconnect applications.
    상세보기
  37. Dulkin, Alexander; Rairkar, Asit; Greer, Frank; Pradhan, Anshu A.; Rozbicki, Robert, Methods and apparatus for engineering an interface between a diffusion barrier layer and a seed layer.
    상세보기
  38. Rozbicki, Robert, Methods and apparatus for resputtering process that improves barrier coverage.
    상세보기
  39. Rozbicki, Robert; van Schravendijk, Bart; Mountsier, Thomas; Wu, Wen, Multistep method of depositing metal seed layers.
    상세보기
  40. Rozbicki, Robert; van Schravendijk, Bart; Mountsier, Tom; Wu, Wen, Multistep method of depositing metal seed layers.
    상세보기
  41. Rozbicki, Robert T.; Powell, Ronald Allan; Klawuhn, Erich; Danek, Michal; Levy, Karl B.; Reid, Jonathan David; Khosla, Mukul; Broadbent, Eliot K., Passivation of copper in dual damascene metalization.
    상세보기
  42. Hobbs, John Peter; Hart, James Joseph, Plasma cleaning gas with lower global warming potential than SF6.
    상세보기
  43. Kailasam, Sridhar; Rozbicki, Robert; Yu, Chentao; Hayden, Douglas, Resputtering process for eliminating dielectric damage.
    상세보기
  44. Juliano, Daniel R., Selective resputtering of metal seed layers.
    상세보기
  45. Ohmi, Tadahiro; Kikuyama, Hirohisa; Miyashita, Masayuki; Izumi, Hiroto; Kujime, Takanobu, Stainless steel having passive fluoride film formed thereon and equipment manufactured therefrom.
    상세보기
  46. Kinouchi, Kouki; Kurokawa, Wataru; Shintani, Shouzou; Shintani, legal representative, Kinuyo; Imoda, Daisuke; Yoshihiro, Kenji; Yamamori, You, Stainless steel member for a fuel cell.
    상세보기
  47. Aswath, Pranesh; Chen, Xin; Sharma, Vibhu; Igartua, Maria Amaya; Pagano, Francesco; Binder, Wolfgang; Zare, Parvin; Doerr, Nicole, Synergistic mixtures of ionic liquids with other ionic liquids and/or with ashless thiophosphates for antiwear and/or friction reduction applications.
    상세보기
  48. Kinder, Ronald L.; Pradhan, Anshu A., Use of ultra-high magnetic fields in resputter and plasma etching.
    상세보기

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