초록 ▼

A recirculating chemical bath arrangement includes a quartz process tank, and a sump chamber disposed directly adjacent to the process tank. A trough extends about the top portion of the outer walls of the process tank, the trough being inclined to cause gravital flow toward the sump chamber. The su

A recirculating chemical bath arrangement includes a quartz process tank, and a sump chamber disposed directly adjacent to the process tank. A trough extends about the top portion of the outer walls of the process tank, the trough being inclined to cause gravital flow toward the sump chamber. The sump chamber includes a fitting in the bottom thereof which directs liquid from the sump into a pump/filter circuit, the output of which is fed into the bottom of the process tank. The liquid is thus caused to overflow the process tank and spill into the trough, and flow into the adjacent sump chamber. A plurality of heater units are secured to the exterior surface of the process tank to heat the liquid therein to the proper process temperature. The sump chamber is unheated, so that the liquid entering the pump/filter is at the coolest temperature of the liquid flow cycle. The process tank and sump chamber may be formed integrally of molded and welded quartz plates, and disposed within an outer case that contains thermal insulation.

대표청구항 ▼

A recirculating, high purity chemical bath, including a first vessel for containing a liquid chemical bath, heater means for transmitting heat to said liquid chemical bath through the wall of said first vessel, a second vessel disposed directly adjacent to said first vessel and having an upper end s

A recirculating, high purity chemical bath, including a first vessel for containing a liquid chemical bath, heater means for transmitting heat to said liquid chemical bath through the wall of said first vessel, a second vessel disposed directly adjacent to said first vessel and having an upper end situated below the level of the upper end of said first vessel, a first fluid fitting disposed in the bottom region of said first vessel and a second fluid fitting disposed in the bottom region of said second vessel, pump and filter means connected between said first and second fluid fittings for pumping a liquid chemical from said bottom region of said second vessel into said bottom region of said first vessel to create an upflow of filtered liquid chemical within said first vessel, a trough extending along the upper extent of at least one side of said first vessel and being inclined downwardly toward said upper end of said second vessel to direct overflow of the liquid chemical from said first vessel into said upper end of said second vessel by gravitational flow of said liquid chemical along said trough, whereby the liquid chemical fills said first vessel and a portion of said second vessel and the liquid chemical entering said first vessel from said pump and filter means causes overflow of the liquid chemical from said first vessel into said trough and thence along said trough and into said second vessel.