초록 ▼

A three-dimensional image of the features on a surface (21) of a substrate (22) is obtained by first spanning the surface with a pair of lines of light (42 and 44), each directed from opposite sides to illuminate each of successive pairs of spaced-apart stripes (46,48) of surface area. The intensity

A three-dimensional image of the features on a surface (21) of a substrate (22) is obtained by first spanning the surface with a pair of lines of light (42 and 44), each directed from opposite sides to illuminate each of successive pairs of spaced-apart stripes (46,48) of surface area. The intensity of the light reflected from each successive strip (27) contiguous to, and lying between, the strips illuminated by the first lines of light is sensed. The surface (21) is next spanned with a second pair of lines of light (58,60) directed from opposite sides. The intensity of light reflected from each successive strip contiguous to, and lying between, the successive strips illuminated by the second pair of lines of light is sensed. A three-dimensional image of the substrate surface can be obtained from a prescribed relationship between the two sensed intensities.

대표청구항 ▼

A method for obtaining a three-dimensional image of a substrate, with reduced incidence of occlusion of shorter features on the substrate by taller features, comprising the steps of: spanning the substrate with a first pair of lines of electromagnetic radiation directed at the substrate from opposit

A method for obtaining a three-dimensional image of a substrate, with reduced incidence of occlusion of shorter features on the substrate by taller features, comprising the steps of: spanning the substrate with a first pair of lines of electromagnetic radiation directed at the substrate from opposite sides so each line irradiates a separate one of a plurality of successive pairs of spaced-apart strips of area on the surface; sensing the intensity of electromagnetic radiation reflected from each strip of area spaced between each successive pair of spaced-apart strips irradiated by a separate one of the first pair of lines of electromagnetic radiation; spanning the substrate with a second pair of lines of electromagnetic radiation directed at the substrate from opposite sides so each line irradiates a separate one of the plurality of successive pairs of spaced-apart strips of area on the substrate surface previously irradiated by a separate one of the first pair of lines of electromagnetic radiation; sensing the intensity of electromagnetic radiation reflected from each strip of area lying between each successive pair of spaced-apart strips irradiated by a separate one of the second pair of lines of electromagnetic radiation; and establishing a three-dimensional image of the substrate in accordance with a prescribed relationship between the intensity of electromagnetic radiation sensed with the substrate is spanned by a first pair of lines of electromagnetic radiation and the intensity of electromagnetic radiation sensed when the substrate is spanned by the second pair of lines of electromagnetic radiation.