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Microbridge flow sensor 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01F-001/68
출원번호 US-0482198 (1990-02-20)
발명자 / 주소
  • Nishimoto Ikuo (Kanagawa JPX) Kurosawa Takashi (Kanagawa JPX) Yamamoto Tomoshige (Kanagawa JPX)
출원인 / 주소
  • Yamatake-Honeywell Co., Ltd. (Tokyo JPX 03)
인용정보 피인용 횟수 : 81  인용 특허 : 0

초록

A microbridge flow sensor includes integral bridge portions and temperature-measuring resistive elements. The bridge portions are integrally formed above the right and left openings of a substrate, respectively. The temperature-measuring resistive elements are respectively formed on the surfaces of

대표청구항

A microbridge flow sensor for detecting material flow comprising: integral bridge portions formed on a surface of a semiconductor substrate so as to be spatially isolated from said semiconductor substrate and defining a through hole passing under the bridge portions communicating a right opening to

이 특허를 인용한 특허 (81)

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