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Microvalve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-031/02
  • F16K-011/65
출원번호 US-0527194 (1990-05-23)
우선권정보 DE-3917396 (1989-05-29)
발명자 / 주소
  • Kowanz Bernd (Linkenheim DEX) Schmidt Dirk (Stutensee DEX) Ehrfeld Wolfgang (Karlsruhe DEX)
출원인 / 주소
  • Burkert GmbH Werk Ingelfingen (Ingelfingen DEX 03) Kernforschungszentrum Karlsruhe GmbH (Karlsruhe DEX 03)
인용정보 피인용 횟수 : 79  인용 특허 : 0

초록 ▼

A valve plate (14) provided with slot-like valve ports (16) is able to slide between two stationary valve plates (10 and 12) which are joined with each other and are provided with corresponding slot-like valve ports (16). A electrostatic drive is integrated in the valve plates (10, 12 and 14). It co

대표청구항 ▼

A microvalve, comprising: (a) at least a first and a second valve plate each provided with elongated valve ports therethrough and with elongated lands between the valve ports, said valve plates being arranged mutually adjacent and movable with respect to each other substantially in perpendicular to

이 특허를 인용한 특허 (79)

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