이 특허를 인용한 특허 (27)

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5. den Hartog Besselink, Edwin; Garssen, Adriaan; Dirkmaat, Marco, Cassette holder assembly for a substrate cassette and holding member for use in such assembly.

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8. Kishkovich Oleg P. ; Goodwin William M., Detection of base contaminants in gas samples.

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9. Kishkovich, Oleg P.; Goodwin, William M., Detection of base contaminants in gas samples.

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10. Milligan, Robert Brennan, Formation of boron-doped titanium metal films with high work function.

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11. Wewers Frank J. ; EuDaly Kevin ; EuDaly Brian K., Gas detection system and method.

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12. Davies David F. (Locks Heath GBX), Gas sensor.

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13. Newman Robert L. ; Duesler John S., Gas sensor with multi-level sensitivity circuitry.

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14. Oishi, Hidetoshi; Suzuki, Akihiro; Tsukabayashi, Shunji; Okajima, Kazuhiro, Hydrogen sensor with dew condensation prevention.

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17. Knaepen, Werner; Maes, Jan Willem; Jongbloed, Bert; Kachel, Krzysztof Kamil; Pierreux, Dieter; De Roest, David Kurt, Method of forming a structure on a substrate.

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18. Lee, Choong Man; Yoo, Yong Min; Kim, Young Jae; Chun, Seung Ju; Kim, Sun Ja, Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method.

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19. Chun, Seung Ju; Yoo, Yong Min; Choi, Jong Wan; Kim, Young Jae; Kim, Sun Ja; Lim, Wan Gyu; Min, Yoon Ki; Lee, Hae Jin; Yoo, Tae Hee, Method of processing a substrate and a device manufactured by using the method.

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20. Kohen, David; Profijt, Harald Benjamin, Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures.

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21. Raisanen, Petri; Givens, Michael Eugene, Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures.

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22. Margetis, Joe; Tolle, John; Bartlett, Gregory; Bhargava, Nupur, Process for forming a film on a substrate using multi-port injection assemblies.

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23. Alokozai, Fred; Milligan, Robert Brennan, Process gas management for an inductively-coupled plasma deposition reactor.

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24. Kishkovich Oleg P. ; Kinkead Devon A., Protection of semiconductor fabrication and similar sensitive processes.

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25. Zhu, Chiyu, Selective film deposition method to form air gaps.

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26. Kishkovich Oleg P. ; Kinkead Devon A., System for detecting base contaminants in air.

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27. Wewers, Frank J.; EuDaly, Brian K., Vent plug for environmentally controlled housing for gas monitoring system.

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