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Fluid pumping apparatus and system with leak detection and containment 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F04B-043/06
출원번호 US-0393142 (1989-08-11)
발명자 / 주소
  • Story Carl E. (Cupertino CA) Nichols Jerry A. (San Jose CA) Cady Byron C. (Gilroy CA)
출원인 / 주소
  • Systems Chemistry, Inc. (Milpitas CA 02)
인용정보 피인용 횟수 : 78  인용 특허 : 0

초록

A fluid pumping apparatus and system including a double acting diaphragm pumping device in which each pumping component has a pair of spaced apart diaphragms defining a containment chamber and all exposed surfaces in the pumping chamber and the containment chamber are made of an inert plastic materi

대표청구항

A fluid pumping apparatus for pumping ultra pure fluids and including means for detection and prevention of contamination of the fluids in the event of diaphragm failure, comprising: means forming a pump housing having an inlet and an outlet; a first pumping component formed within said housing and

이 특허를 인용한 특허 (78)

  1. West,Todd M.; Kennedy,Dennis E., Air driven hydraulic pump.
  2. Yokomizo,Kenji, Apparatus and method of securing a workpiece during high-pressure processing.
  3. Gibson,Gregory M., Apparatus and methods for pumping high viscosity fluids.
  4. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Apparatus for supercritical processing of a workpiece.
  5. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Apparatus for supercritical processing of multiple workpieces.
  6. Jones,William Dale, Control of fluid flow in the processing of an object with a fluid.
  7. Reed, David Alan; Hogue, Timothy David, Control system for an air operated diaphragm pump.
  8. Meloche Joseph L. ; Stuart Kevin C., Diaphragm failure sensing apparatus and diaphragm pumps incorporating same.
  9. Jüterbock, Karsten; Basso, Angelo, Diaphragm pump.
  10. Murata, Shigeru, Diaphragm-type pumping apparatus.
  11. Wheal, Peter, Double-diaphragm pumps.
  12. Layman, Fredrick, Dual diaphragm pump.
  13. Ohya, Ikuo; Komuro, Hirokazu, Electromagnetic vibrating type diaphragm pump.
  14. Cedrone, James; Gonnella, George, Error volume system and method for a pump.
  15. Steck, Ricky B.; Dunn, Michael; Orr, Troy; Stillings, Matthew; Kingsbury, David, Fiber optic system for detecting pump cycles.
  16. Steck, Ricky B.; Dunn, Michael; Orr, Troy; Stillings, Matthew; Kingsbury, David, Fiber optics systems for high purity pump diagnostics.
  17. Ricky B. Steck ; Michael R. Dunn ; Troy Orr ; Matthew J. Stillings ; David Kingsbury, Free-diaphragm pump.
  18. Steck Ricky B. ; Dunn Michael R. ; Orr Troy ; Stillings Matthew J. ; Kingsbury David, Free-diaphragm pump.
  19. Sheydayi,Alexei; Sutton,Thomas, Gate valve for plus-atmospheric pressure semiconductor process vessels.
  20. Anex, Deon S.; Nip, Kenneth Kei-ho, Gel coupling diaphragm for electrokinetic delivery systems.
  21. Jones, William D., High pressure fourier transform infrared cell.
  22. Biberger, Maximilian A.; Layman, Frederick Paul; Sutton, Thomas Robert, High pressure processing chamber for semiconductor substrate.
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  24. Jones,William Dale, High-pressure processing chamber for a semiconductor wafer.
  25. Jones,William Dale, High-pressure processing chamber for a semiconductor wafer.
  26. Cedrone, James; McLoughlin, Robert F.; Gonnella, George, I/O systems, methods and devices for interfacing a pump controller.
  27. Cedrone, James; McLoughlin, Robert F.; Gonnella, George, I/O systems, methods and devices for interfacing a pump controller.
  28. Sheydayi,Alexei, Method and apparatus for clamping a substrate in a high pressure processing system.
  29. Goshi,Gentaro, Method and apparatus for cooling motor bearings of a high pressure pump.
  30. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Method and apparatus for supercritical processing of multiple workpieces.
  31. Parent,Wayne M.; Goshi,Gentaro, Method and system for cooling a pump.
  32. Parent,Wayne M., Method and system for determining flow conditions in a high pressure processing system.
  33. Cedrone, James; Gonnella, George; Gashgaee, Iraj; Stankowski, Ralph J., Method and system for high viscosity pump.
  34. Parent, Wayne M.; Geshell, Dan R., Method and system for passivating a processing chamber.
  35. Hansen,Brandon; Lowe,Marie, Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid.
  36. Kawamura,Kohei; Asano,Akira; Miyatani,Koutarou; Hillman,Joseph T.; Palmer,Bentley, Method for supercritical carbon dioxide processing of fluoro-carbon films.
  37. Biberger, Maximilian Albert; Layman, Frederick Paul; Sutton, Thomas Robert, Method for supercritical processing of multiple workpieces.
  38. Biberger,Maximilian Albert; Layman,Frederick Paul; Sutton,Thomas Robert, Method of supercritical processing of a workpiece.
  39. Steck,Ricky B.; Dunn,Michael, Molded disposable pneumatic pump.
  40. Sheydayi,Alexei, Non-contact shuttle valve for flow diversion in high pressure systems.
  41. Gashgaee, Iraj, O-ring-less low profile fittings and fitting assemblies.
  42. McDowell,William M.; Nguyen,John T., Peristaltic injector pump leak monitor.
  43. McDowell,William M.; Nguyen,John T., Peristaltic injector pump leak monitor.
  44. Sheydayi,Alexei, Pressure energized pressure vessel opening and closing device and method of providing therefor.
  45. Wuester,Christopher D., Process flow thermocouple.
  46. Zagars,Raymond A.; McLoughlin,Robert F., Pump controller for precision pumping apparatus.
  47. Navarro Bonet Jose Manuel,ESX, Pump for pumping through a variable volume plunger chamber having a pair of plungers disposed in a stepped cylinder with a slide valve.
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  50. Mullee, William H., Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process.
  51. Kohl, Kristopher T.; Means, Charles Mitchell, Subsea chemical injection pump.
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  53. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with reduced form factor.
  54. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with reduced form factor.
  55. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
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  60. Gonnella, George L.; Cedrone, James, System and method for monitoring operation of a pump.
  61. Gonnella, George; Cedrone, James, System and method for monitoring operation of a pump.
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  63. Mcloughlin, Robert F., System and method for multiplexing setpoints.
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  66. Gonnella, George; Cedrone, James; Gashgaee, Iraj, System and method for position control of a mechanical piston in a pump.
  67. Cedrone, James; Gonnella, George, System and method for pressure compensation in a pump.
  68. Cedrone, James; Gonnella, George L., System and method for pressure compensation in a pump.
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  71. Gonnella, George; Cedrone, James; Gashgaee, Iraj; Magoon, Paul, System and method for valve sequencing in a pump.
  72. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for variable dispense position.
  73. Green Steven R. ; Powell ; Jr. David L., System for monitoring diaphragm pump failure.
  74. Green Steven R. ; Powell ; Jr. David L., System for monitoring diaphragm pump failure.
  75. Locke, Christopher Brian; Tout, Aidan Marcus, Systems and methods for supplying reduced pressure and measuring flow using a disc pump system.
  76. Jacobson,Gunilla; Yellowaga,Deborah, Treatment of a dielectric layer using supercritical CO.
  77. Kevwitch, Robert, Treatment of substrate using functionalizing agent in supercritical carbon dioxide.
  78. Sheydayi,Alexei, Vacuum chuck utilizing sintered material and method of providing thereof.
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