System for locating probe tips on an integrated circuit probe card and method therefor
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01R-001/00
G01R-001/067
출원번호
US-0524139
(1990-05-14)
발명자
/ 주소
Sigler Michael R. (Colorado Springs CO)
출원인 / 주소
Triple S Engineering, Inc. (Colorado Springs CO 02)
인용정보
피인용 횟수 :
86인용 특허 :
0
초록▼
A system for determining probe tip alignment for a probe card having a plurality of probes downwardly extending in a defined region of the probe card. Each probe has a tip assigned to a precise X, Y position in a plane spaced from the probe card. The assigned X, Y position is dictated by the topolog
A system for determining probe tip alignment for a probe card having a plurality of probes downwardly extending in a defined region of the probe card. Each probe has a tip assigned to a precise X, Y position in a plane spaced from the probe card. The assigned X, Y position is dictated by the topology of the integrated circuit chip for which the probe card was designed. A first memory stores the assigned X, Y position for each of the tips, a second memory stores the measured location of the plane that each of the tips is found in, and a sensor measures the actual X, Y position of an individual probe tip. The sensor is moved to the measured plane at the assigned X, Y position for each tip and obtaining, for each tip, a meausred X, Y position. A computer then displays in a monitor by means of suitable icons, all probes which have a measured X, Y position within an acceptable window of the assigned X, Y position and then displays, with suitable icons, all probe tips having a measured X, Y position exceeding the window of acceptability.
대표청구항▼
A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the
A system for determining probe tip alignment for a probe card (10) having a plurality of probes (60) downwardly extending in a defined region (50) of said probe card, each probe having its tip (70) assigned to an X, Y position (140) in a plane (130) spaced from said probe card, each probe having the location of its tip (70) measured with respect to said plane, said system comprising: first means (560) for storing said assigned X, Y position for each of said plurality of tips, second means (590) for storing said measured location of the plane that each of said plurality of tips is found in, means (520, 530) for measuring the X, Y position of at least one probe tip, said measuring means including: an insulating substrate (710), a resistive film (720) deposited on said insulating substrate in a predetermined pattern, conductive pads (730) deposited to contact said resistive film for providing an X direction conductive path (X1-X2) through said resistive film and for providing a Y direction conductive path (Y1-Y2) through said resistive film, and a second insulating layer deposited over said insulating substrate, said resistive film, and said conductive paths, said second layer having a formed opening over said resistive film defining a measurement area (760) for the selective engagement by one probe tip; means (Mx, My, Mz) for moving said measuring means, and means (500) connected to said moving means and to said first and second storing means for activating said moving means to move said measuring means until said at least one of said plurality of probe tips at said measured plane locations from said second storing means and at the assigned X, Y positions from said first storing means engages said measuring means, said measuring means determining the measured X, Y positions of said at least one of said plurality of probe tips when engaged.
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