초록 ▼

A laser beam scanning system is used as a laser probing apparatus. The apparatus includes an acousto-optic modulator provided on an optical path for intensity-modulating a laser beam in accordance with an input signal, a beam intensity control device for measuring a beam intensity distribution of th

A laser beam scanning system is used as a laser probing apparatus. The apparatus includes an acousto-optic modulator provided on an optical path for intensity-modulating a laser beam in accordance with an input signal, a beam intensity control device for measuring a beam intensity distribution of the laser beam incident on a wafer surface, for correcting the input signal to the modulator as a result of measurement, and for making uniform the laser beam illumination distribution over the wafer surface, and a device for measuring an electrical variation in that wafer pattern portion illuminated with the laser beam.

대표청구항 ▼

A laser beam scanning system comprising: a laser beam source for emitting a laser beam; an optical means located along an optical path for a laser beam to be conducted to a surface of a sample; acousto-optic modulating means provided on the optical path to allow the laser beam to be continuously int

A laser beam scanning system comprising: a laser beam source for emitting a laser beam; an optical means located along an optical path for a laser beam to be conducted to a surface of a sample; acousto-optic modulating means provided on the optical path to allow the laser beam to be continuously intensity-modulated in accordance with an input signal; laser beam intensity control means for measuring an intensity distribution of the laser beam incident onto the sample surface, for making uniform a laser beam illumination distribution on the surface of the sample; laser beam deflecting means provided on the optical path to allow the laser beam to be deflected in accordance with an input signal; position detecting means for detecting a position of the laser beam incident on the sample surface and for delivering a beam illumination position information signal; deviation detecting means coupled to said position detecting means be detecting any deviation in the scan of said laser beam from a predetermined position and the actual beam illumination position and laser beam deflecting control means coupled to said laser beam deflecting means for correcting, in response to said deviation detecting means, the signal provided to the laser beam deflecting means, such that the projected spot of said laser beam scans at a predetermined position.