[특허]Process and system for purifying pure water or ultrapure water

Process and system for purifying pure water or ultrapure water 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B01D-015/04
출원번호	US-0625427 (1990-12-11)
우선권정보	JP-0327135 (1989-12-19)
발명자 / 주소	Saito Takayuki (Kanagawa JPX) Nakajima Ken (Kanagawa JPX) Iwase Yoki (Kanagawa JPX) Ikeda Yukio (Tokyo JPX) Shima Hiroyuki (Kanagawa JPX)
출원인 / 주소	Ebara Corporation (Tokyo JPX 03) Ebara Research Co., Ltd. (Fujisawa JPX 03)
인용정보	피인용 횟수 : 90 인용 특허 : 0

초록 ▼

Ultrapure water of extremely high purity, i.e. a so-called ultra-ultrapure water is formed by the present system for purifying a pure water or ultrapure water, (1) the TOC component which was contained in pipes, etc. and which was subsequently dissolved in a pure water or ultrapure water to be treated, is decomposed and the pure water or ultrapure water is simultaneously sterilized, by the combined use of an oxidizing agent and ultraviolet irradiation, (2) the DO contained in the water to be treated and the DO derived from the addition of the oxidizing agent are decomposed into H2O and simultaneous sterilization is effected, by the combined use of H2 gas and ultraviolet irradiation, (3) the remaining H2 gas is removed by a membrane degassing unit, and (4) the resulting water is subjected to an ion exchange treatment and an ultrafiltration treatment, in the above order, whereby the pure water or ultrapure water whose purity has been reduced by, for example, the dissolution of the impurities contained in pipes can be purified and converted to an ultrapure water of extremely high purity. The resulting ultrarapure water is particularly utilized as a rinsing water in the electronics industry where ultrahigh density integrated circuits (ULSI circuits) represented by 4 megabit dynamic memory are produced.

대표청구항 ▼

A process for purifying pure water or ultrapure water by treating pure water or ultrapure water to produce ultrapure water of high purity, which process comprises the steps of: (a) dissolving an oxidizing agent comprising one of ozone or hydrogen peroxide in pure water or ultrapure water and irradiating the resulting water with ultraviolet rays, whereby a total organic carbon component is decomposed and simultaneously the pure water or ultrapure water is sterilized; (b) dissolving hydrogen gas in the treated water obtained in step (a) and irradiating the resulting water with ultraviolet rays, whereby dissolved oxygen contained in the water to be treated and dissolved oxygen derived from the addition of the oxidizing agent are decomposed into H2O and simultaneously sterilization is effected; (c) passing treated water obtained in step (b) over one side of a gas permeable membrane while keeping the other side of the membrane in a vacuum, to effect membrane degassing for said water, whereby remaining H2 gas is removed; (d) passing treated water obtained in step (c), through an ion exchange resin layer which is a mixture of a H+strongly acidic cation exchange resin and a OH-strongly basic anion exchange resin, whereby ions and silica are removed; and (e) subjecting treated water obtained in step (d), to ultrafiltration, whereby fine particles are removed.

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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

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Process and system for purifying pure water or ultrapure water 원문보기

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Process and system for purifying pure water or ultrapure water 원문보기

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연구과제 타임라인

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