이 특허를 인용한 특허 (20)

1. Sansegundo-Sanchez, Javier; Benavides-Rel, Xavier; Vales-Canle, Manuel; Tomas-Martinez, Maria, Cooled gas distribution plate, thermal bridge breaking system, and related methods.

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2. Weidhaus, Dieter; Crössmann, Ivo; Schreieder, Franz, Dust-free and pore-free, high-purity granulated polysilicon.

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3. Arvidson, Arvid Neil; Horstman, Terence Lee; Molnar, Michael John; Schmidt, Chris Tim; Spencer, Jr., Roger Dale, Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods.

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4. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.

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5. Sanchez, Javier San Segundo; Barona, Jose Luis Montesinos; Conejero, Evaristo Ayuso; Canle, Manuel Vicente Vales; Rel, Xavier Benavides; Garcia, Pedro-Tomas Lujan; Martinez, Maria Tomas, Fluidized bed reactor for production of high purity silicon.

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6. Hertlein, Harald; Hauswirth, Rainer; Weidhaus, Dieter, Granular polycrystalline silicon and production thereof.

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7. Weckesser, Dirk; Hauswirth, Rainer, Granular polycrystalline silicon and production thereof.

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8. Miller, Matthew J.; Spangler, Michael V.; Zeininger, Gerald A.; Onstot, William J.; Stupin, Walter J., Joint design for segmented silicon carbide liner in a fluidized bed reactor.

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9. Miller, Matthew J.; Spangler, Michael V., Method and apparatus to reduce contamination of particles in a fluidized bed reactor.

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10. Froehlich, Robert; Mixon, David, Methods and system for cooling a reaction effluent gas.

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11. Yilmaz, Sefa; Miller, Matthew J.; Spangler, Michael V.; Wemp, Barry; Julsrud, Stein, Non-contaminating bonding material for segmented silicon carbide liner in a fluidized bed reactor.

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12. Miller, Matthew; Spangler, Michael V.; Wemp, Barry; Osborne, E. Wayne, Probe assembly for a fluid bed reactor.

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13. Schreieder Franz,DEX ; Kim Hee Young,KRX, Process for preparing highly pure silicon granules.

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14. Haeckl, Walter; Hesse, Karl; Hoebold, Wilhelm; Wolf, Reinhard, Process for producing polycrystalline silicon.

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15. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue, Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor.

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16. Bhusarapu, Satish; Gupta, Puneet; Huang, Yue, Production of polycrystalline silicon by the thermal decomposition of silane in a fluidized bed reactor.

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17. Chu, Xi, Reactor and method for producing high-purity granular silicon.

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18. Froehlich, Robert; Fieselmann, Ben; Mixon, David; Tsuo, York, Reactor with silicide-coated metal surfaces.

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19. Osborne, E. Wayne; Miller, Matthew J.; Spangler, Michael V.; Zeininger, Gerald A.; Onstot, William J.; Stupin, Walter J., Segmented silicon carbide liner.

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20. Arvidson, Arvid Neil; Molnar, Michael, Silicon production with a fluidized bed reactor integrated into a Siemens-type process.

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