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NTIS 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0674433 (1990-11-19) |
발명자 / 주소 |
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출원인 / 주소 |
|
인용정보 | 피인용 횟수 : 14 인용 특허 : 0 |
A vacuum processing system and method by which system turbulence is reduced utilizing a vacuum responsive flow controlling valve that is located between a vacuum pump and a vacuum processing chamber to restrict the rate of pumpdown. A valve member of the flow controlling valve, such as a butterfly v
Vacuum processing method comprising the steps of: A) turning on a vacuum pump which has a low pressure side connected to a vacuum processing chamber via a vacuum line having a valve member of a vacuum responsive flow controlling valve disposed therein between the pump and said chamber; B) allowing g
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